H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 8882E-8i 1.3856076962778623E-8-1.6455850200359477E-8i -8.953235809402299E-6+2.494639745391954E-6i -3.021338783467787E-5 -1.0978846018786835E-4 0 1.1403595855802307E-8-1.1922705063967717E-8i 1.3351084225445472E-8-1.5910974906820547E-8i -8.420160502111326E-6+2.275617558731661E-6i 3.327131974817774E-5 -1.3394697515519452E-4 0 -1.034302937562506E-7+1.9752561296073207E-8i 4.6702130474766E-9-2.538757554650717E-8i -2.3048956176418896E-5+6.965101373812993E-6i 3.14280619942592E-5 -1.3266290623910562E-4 0 -7.647146829280572E-8+1.3077051461898102E-8i 1.658763881869716E-8-2.8897174807070283E-8i -2.1434761438906768E-5+6.537325054047083E-6i 3.3246221598723915E-5 -1.3229542607246105E-4 -3.5036968371549302E-6 4.680369588850859E-6-1.3258354157877003E-6i 2.1078567016721665E-6-6.722190555390715E-7i -2.2093989277603243E-5+6.763262530173073E-6i 3.287820268554072E-5 -1.364381467116692E-4 0 2.8110470947501076E-9-6.8217571713019565E-9i 2.3637329726357292E-8-3.0732048538796575E-8i -2.0916647383362434E-5+6.333056914466135E-6i 3.3164433267462045E-5 -1.3792287168315644E-4 -1.9642761013419167E-6 2.2163438048212534E-6-6.106744256318547E-7i 1.1232372562439865E-6-3.620116885728134E-7i -1.9919246058804334E-5+6.041177125130105E-6i 3.138189399879796E-5 -1.4674124949517645E-4 -2.355198811340698E-6 1.2053103875607642E-6-3.3875592638775304E-7i 9.62614098560762E-7-3.0630905390229925E-7i -1.4507552620775741E-5+4.434404407610118E-6i 3.0003033495975603E-5 -1.337922387389234E-4 -3.2329085888820394E-6 2.55762452537066E-6-7.492334093194394E-7i 1.5004262045806939E-6-4.845149500493679E-7i -1.8874271607198117E-5+5.7992184155597286E-6i 3.041172476898176E-5 -1.3512317549953153E-4 0 -2.7665365634939782E-8+5.672014779152986E-10i 1.7924819267767234E-8-2.8622759862493668E-8i -1.9176235187656765E-5+5.8634136384609166E-6i 3.2999607413272106E-5 -1.3919236995305967E-4 0 -9.91779407012475E-8+1.6597826210662525E-8i 2.3426716995582228E-8-2.9017808549964223E-8i -1.953522511690804E-5+5.904328948171746E-6i 3.2462003655762415E-5 -1.4277901266062805E-4 0 -1.5980627733293603E-7+3.086321622201528E-8i -6.5548585822015575E-9-2.1323197608254986E-8i -1.7181270681471737E-5+5.2075042843900896E-6i 3.193687363098444E-5 -1.4368275350301173E-4 -2.0712713744927065E-6 1.3940648959549773E-6-3.873367517524817E-7i 9.61322267409506E-7-3.0753151128466483E-7i -1.6134951873848665E-5+4.915800305926287E-6i 2.9467797317844757E-5 -1.4416050832683598E-4 0 -6.506770967357694E-9-1.418766001146856E-9i 2.878542840989681E-8-3.025161435717001E-8i -1.4813315722806369E-5+4.534186148430486E-6i 2.9203221816288073E-5 -1.4072136574297585E-4 -2.9126999790334626E-6 1.5746988589069557E-6-4.5925452927232126E-7i 1.1456022402223823E-6-3.6953019170477266E-7i -1.5666269489088816E-5+4.809313910093815E-6i 3.0473148690494776E-5 -1.413103964835536E-4 0 -1.1414335561348128E-7+2.4459211207698946E-8i 4.6524264622440126E-10-2.2389450400510487E-8i -1.6513262247385513E-5+5.038602018090875E-6i 2.968635164205136E-5 -1.3829430684952733E-4 0 -3.799561172357358E-8+5.0564900086480515E...
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This document was uploaded on 01/24/2014.

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