H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 258818E-8i 6.990044945983322E-9+3.6525480581214075E-8i -1.6975444711436516E-6+1.2516012142438466E-7i -1.8881135654570368E-4 -6.331605083878986E-6 -1.5355519892366337E-6 1.1525077368148073E-7+1.7523677041003767E-7i 1.5714848499710826E-8+5.986471873016961E-8i -1.7056256158308024E-6+1.0903457141118443E-7i -1.821476894657812E-4 -1.527891120039278E-6 0 2.854064134062261E-9-2.0944425355751526E-9i -6.794417418969919E-10-2.0087024482903648E-10i -1.6272255770556894E-6+7.490190548290526E-7i -1.807346998570469E-4 -2.7469238211500415E-6 -1.6951594448688717E-6 7.64381127011239E-8+5.7629014366098794E-8i -4.384986531695341E-9+3.4959273765911854E-8i -1.6951153142779578E-6+6.768228699605558E-7i -1.841188917232931E-4 -6.755208751787123E-7 0 3.1206061083073265E-9-3.4533339088923393E-9i 2.349128501097364E-10+1.4076704732291098E-9i -1.5105918862753132E-6+9.058077344113187E-7i -1.8285598805951127E-4 4.499446092604085E-7 0 3.85673152806201E-9-3.438712645726749E-11i 3.537663373144537E-10-1.579518338434563E-9i -1.591409392395345E-6+7.839070771740041E-7i -1.8374201754923006E-4 2.6573775868968574E-7 -1.1358317325828151E-6 7.9308142548641E-8+1.159200506529997E-7i 3.138006265003796E-11-2.771615255921764E-9i -1.5513802765606123E-6+8.190018697289149E-7i -1.817109863069898E-4 -7.110971247682597E-7 -1.8169500025065348E-6 8.157449665409586E-8+7.031496171353019E-8i -2.6834800371259405E-10+7.894136157664034E-9i -1.655297735397537E-6+6.854717345331932E-7i -1.884700236165748E-4 -1.5508492351946825E-6 0 -1.2478841063985647E-7-3.3990033710172995E-7i 9.984057417681082E-9+2.8053914638353444E-8i -1.8442608741773043E-6-2.468026972664344E-7i -1.890071845526279E-4 -1.751501890962735E-6 -1.5000541666123305E-6 1.483560543739449E-7+2.7996156249864176E-7i 2.8270946165263277E-9+1.2295769284517602E-8i -1.7135357549784654E-6+5.567052378608004E-8i -1.900928345906643E-4 -2.0910024695059E-6 0 -3.844209519286712E-10-1.6214535459777283E-8i -5.984610632471347E-10-4.794471177493528E-11i -1.6904448070956105E-6+5.6416366902928954E-8i -1.8848249848538867E-4 1.3354169525958898E-6 0 -2.8544098771988692E-8-8.915602982734125E-8i 1.394989028028071E-9+1.1341568805632747E-9i -1.8602290045317867E-6-2.8946070353007894E-7i -1.8842532483427107E-4 6.002822243428688E-8 0 -3.8458995595105684E-8-1.1456100652182355E-7i -3.2539720715564317E-9-8.900487636717843E-9i -1.8415564715006999E-6-2.3859923040322854E-7i -1.8913919880880382E-4 9.981036355941432E-7 -1.095880054775167E-6 1.1190269347226476E-7+2.102989511645206E-7i -1.88768132793003E-9-7.854247178663773E-9i -1.7414432227232277E-6-2.4090753702999367E-8i -1.8951148801776385E-4 -7.312150109200014E-7 0 4.6487393614765817E-10-1.3596947242885026E-8i 6.649198098752143E-10+2.238083855529918E-9i -1.7437882887782278E-6-4.9576755286668526E-8i -1.9106164599115246E-4 -1.9375993446894175E-6 -1.332956525828161E-6 6.336595757776998E-8+7.364245787586156E-8i 9.102182395390873E-10+5.206979763756458E-9i -1.6256419728155305E-6+1.649431826259561E-7i -1.8997800215070576E-4 6.929218282794537E-7 0 5....
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This document was uploaded on 01/24/2014.

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