H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 6E-7+8.293746151894808E-9i -2.3986320820154752E-8-5.2692333922161955E-9i -2.154175673801075E-6+5.377898021569006E-7i -1.6476722911044558E-4 -4.112625913586757E-6 -1.9586808837783803E-6 8.120666546504321E-8+9.201615741093145E-9i -1.254119481949974E-7-3.297508104911951E-8i -2.2875004767710085E-6+5.18563870672916E-7i -1.0804503637632544E-4 6.653585861970708E-6 -2.8647354436254777E-6 2.1967724138879624E-7-3.574083048921268E-8i 7.005550827472759E-7+2.88612018335013E-7i -4.758151226638613E-6+9.61106062453443E-7i -1.0547933666522093E-4 5.842517106739144E-6 -3.542571448392113E-6 2.715898477803457E-7-5.386309886227056E-8i 5.587131973666638E-7+2.3444497450200908E-7i -4.929604402163659E-6+9.992933669439585E-7i -1.200304759996402E-4 5.805412765676308E-6 -3.808593750000001E-6 2.332838790790004E-7-3.4482888780050564E-8i 4.668503989626157E-7+1.8750871493191654E-7i -4.011004798146721E-6+7.956343354853111E-7i -1.117727762458037E-4 5.724471467532494E-6 -3.85771587557261E-6 2.6502714826418287E-7-4.816259319323782E-8i 4.982899340598548E-7+2.0561787666401534E-7i -4.4987473611921486E-6+9.016312050343276E-7i -1.2096489298351739E-4 -6.2134937024673285E-6 -2.974354057967977E-6 1.8709286207940145E-7-2.3021315735555463E-8i -5.60521447487779E-7-2.2509028189900165E-7i -4.010787254564091E-6+7.715237135514019E-7i -1.1567470700038947E-4 -5.823349787659027E-6 -2.736050503733018E-6 1.8510448814530205E-7-2.6678738810577337E-8i -5.613726513302482E-7-2.3114382541802796E-7i -4.374607209402839E-6+8.09200635464975E-7i -1.1944402120981154E-4 -1.526464222349195E-4 -3.126373623825108E-6 8.520449719070285E-8-8.576656905118092E-9i 5.861527701088868E-7+2.090594072777957E-7i -2.2009305590158564E-6+4.1612773655058793E-7i -1.2122410735066902E-4 -1.5012733014818725E-4 -5.130014777596949E-6 1.370704426858239E-7-1.2702683838417457E-8i 5.860243785078461E-7+1.8957520374161586E-7i -2.0179591455563595E-6+4.883786990751552E-7i -1.224604161831776E-4 -1.5268552436585361E-4 -3.3063863068542987E-6 8.813798627662851E-8-8.276537866043614E-9i 5.597832179987301E-7+1.9774590456318776E-7i -2.1346462977691787E-6+4.04430231329841E-7i -1.1060463828784313E-4 -1.500885693051847E-4 -3.7208963906338276E-6 1.086128198260353E-7-1.211512834359274E-8i 6.840227316086888E-7+2.361925333750365E-7i -2.254178794006264E-6+5.415203706331034E-7i -1.1807995144496686E-4 -1.513372976364558E-4 -4.952985914400722E-6 1.27994747616376E-7-1.5946028608858673E-8i 5.768059483433034E-7+1.8620135053557503E-7i -2.118772319107024E-6+4.776925143654529E-7i -1.0344066394319046E-4 -1.5203988261173676E-4 -2.9901780261095585E-6 8.341214335037817E-8-1.52114974997991E-8i 6.91421116295386E-7+2.471775911353718E-7i -2.5171675016804554E-6+5.222278656768513E-7i -1.9992283651443354E-4 1.8594839984247077E-5 -1.6388966729879917E-5 2.835276919526582E-7-1.843328973394877E-8i -1.484010617631992E-9+2.7580604406710393E-9i -1.3358566823384386E-6+3.2460476327261687E-7i -2.0245169797076807E-4 2.16065132691665E-5 -2.1959079898513252E-5 3.420852776351692E-7-3.9332818236363724E-8i -8.17552302011...
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This document was uploaded on 01/24/2014.

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