H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 8187311472582E-7+6.039622202453052E-8i -2.3425914033511575E-5+7.275781971137734E-6i 6.885708854390579E-5 1.568532303154284E-4 1.5998849160953745E-6 -7.046287186666185E-7+2.494705162364502E-7i 5.210956589063562E-6-1.4335202983303645E-6i -2.6423088976215096E-5+8.03031325290139E-6i 6.821612281602565E-5 1.5926905348555244E-4 0 -1.563646643068517E-8+2.0423573415806473E-8i -1.528945908953657E-7+5.828777986660594E-8i -2.2385603901360823E-5+6.840708144735541E-6i 7.233258645330618E-5 1.589166181905977E-4 3.5613921726075406E-6 -1.0234868916237597E-6+3.5881051076418896E-7i 5.944725003161045E-6-1.730105548393944E-6i -2.1887207367943186E-5+6.7800319847715745E-6i 7.045910413781171E-5 1.6280619869315374E-4 0 1.8102618827164265E-8+1.0328356296020084E-8i -9.490663454140936E-8+3.8982831876094894E-8i -1.8220416095503866E-5+5.645302044564562E-6i 7.285265632823117E-5 1.6068592642033634E-4 0 -2.553487444131979E-8+2.48810776484291E-8i 1.7813254911595701E-7-3.636111607602552E-8i -2.13353873540154E-5+6.590173313360568E-6i 6.543006472500361E-5 1.5318448216020445E-4 7.500000000000001E-8 -1.2321846221870676E-6+4.1091611691079777E-7i 2.2770745672288466E-5-5.939157685948733E-6i -2.6188595493934617E-5+8.419352835445406E-6i 6.546376793038789E-5 1.5282244124559163E-4 2.02000321749084E-6 -2.2087844098246006E-6+7.353893144861111E-7i 1.78198028425396E-5-4.848094066427179E-6i -2.3330865013167657E-5+7.473979957072548E-6i 6.447347231334051E-5 1.5108253241903247E-4 7.500000000000001E-8 -2.6202496770169614E-6+8.57431143200249E-7i 2.177231291463841E-5-5.921981449695003E-6i -2.0841612634030148E-5+7.084351426976321E-6i 6.596994596146873E-5 1.4904670120945978E-4 7.500000000000001E-8 -3.760347356575937E-6+1.2523873457219825E-6i 2.275128931775196E-5-6.4552015092457504E-6i -1.8399413123880287E-5+6.518906151405681E-6i 6.822944622020141E-5 1.515873304659116E-4 3.0329179754251164E-6 -2.9441883875854874E-6+9.934500643178172E-7i 1.8615677929992448E-5-5.292376999775119E-6i -2.1250274292804183E-5+6.957696851255431E-6i 6.875977895682237E-5 1.4835867886181482E-4 7.500000000000001E-8 -3.997623432427933E-6+1.3523691886119237E-6i 2.437715844778726E-5-7.082123888046965E-6i -1.8008662745474085E-5+6.458903617421715E-6i 7.099591363521264E-5 1.4912749009634232E-4 7.500000000000001E-8 -3.41837664205668E-6+1.16766885090004E-6i 2.5756564217003602E-5-7.465732050632785E-6i -1.9448613255800807E-5+6.876762048103131E-6i 6.489459253290651E-5 1.5754878529922173E-4 3.003626849624298E-6 -1.1255495259588494E-6+3.847102513068928E-7i 5.943563808454175E-6-1.653816304718117E-6i -2.196750105526163E-5+6.727144292388211E-6i 6.662081098116931E-5 1.612477205906329E-4 0 4.805714161253466E-8+1.4497576103298059E-9i -1.4187953887661755E-7+5.414227199574429E-8i -1.900504795750669E-5+5.846140282188639E-6i 6.38280222942548E-5 1.6153758189121293E-4 0 -3.527479938425504E-8+2.4215395177246136E-8i -2.569452768354935E-7+8.481719997177617E-8i -1.7988123551841363E-5+5.525594460388102E-6i 5.9319473512027615E-5 1.5393127648649537E-4 2.0195533156522957E-6 -1.7635597127867463E-6+5.75446127425...
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This document was uploaded on 01/24/2014.

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