H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 118199E-19-9.951141086577736E-20i -2.144824429081078E-18+1.1972840593762776E-18i -6.224216664977148E-4 -3.377023516388639E-4 -2.409406374437246E-4 4.266747565673063E-8-1.2881956774310907E-8i 1.997063187263274E-8-5.969322165072026E-9i -3.866889689523897E-8+1.1869297836983923E-8i -6.337384240704007E-4 -3.4384239439593417E-4 -2.4532137630633777E-4 7.531610680014389E-9-2.3073809448123887E-9i 3.7886791419527514E-9-1.1485603366934974E-9i -6.548661217115032E-9+2.058133828039484E-9i -6.676886967884579E-4 -3.6226252266714494E-4 -2.584635928941773E-4 1.7535151034486362E-11-5.856282395466877E-12i 9.214271167930096E-12-2.819943204154216E-12i -1.2690012817507901E-11+5.139342613688452E-12i -6.790054543611436E-4 -3.6840256542421525E-4 -2.628443317567905E-4 7.135844399422956E-19-4.3283266339945935E-19i 3.273925021001994E-19-1.087065569065532E-19i -2.1762157409695745E-18+1.1924390822089952E-18i -4.6405340686915737E-4 -1.2780797137750888E-4 -5.725587812840651E-4 8.654520970644709E-8-2.627334373126075E-8i 1.970040873557333E-8-5.893328415836641E-9i 3.4530548387747266E-8-1.0019368470455628E-8i -4.7249074153950563E-4 -1.301317526752818E-4 -5.829689409437754E-4 1.477956117375409E-8-4.539998187537376E-9i 3.6956994779123373E-9-1.1154846277306084E-9i 6.797230409486517E-9-1.9783868058438627E-9i -4.978027455505508E-4 -1.3710309656860047E-4 -6.141994199229063E-4 3.2385531010632944E-11-1.1009895968397729E-11i 8.650156813123895E-12-2.6289010081584747E-12i 1.9174077949771883E-11-4.861312738132197E-12i -5.062400802208991E-4 -1.3942687786637337E-4 -6.246095795826165E-4 1.3491565100890795E-18-9.153124178509654E-19i 2.8234041430056835E-19-8.74031055152221E-20i -1.1200080520142126E-18+7.3154247949662865E-19i -5.183417954993573E-4 -1.281613004416117E-4 -5.238324771409436E-4 8.368774914580312E-8-2.5336471622550853E-8i 1.739534258782253E-8-5.194502821170026E-9i 1.831713697053548E-8-5.134061716536724E-9i -5.277661917811639E-4 -1.3049150590418643E-4 -5.333567039980516E-4 1.4604350142411676E-8-4.477097354659987E-9i 3.303540109924167E-9-9.968864519291835E-10i 3.899800251377407E-9-1.0985121799612728E-9i -5.560393806265833E-4 -1.3748212229191064E-4 -5.619293845693757E-4 3.2829465140474435E-11-1.1028881115117945E-11i 7.871791230034774E-12-2.3896473979338884E-12i 1.2693026459525963E-11-2.7681704821430614E-12i -5.654637769083898E-4 -1.398123277544854E-4 -5.714536114264837E-4 1.3069897305723148E-18-8.4679058279321E-19i 2.507621642685293E-19-7.458654712335717E-20i -1.380834418360404E-18+8.702916105417503E-19i -5.788359831174533E-4 -1.918488656582552E-4 -4.331823142674358E-4 7.314296145488386E-8-2.2081334472766968E-8i 2.071118527491119E-8-6.1742256969351705E-9i -5.2865765065317485E-9+1.9316482594876556E-9i -5.893602737195888E-4 -1.9533702685204168E-4 -4.4105835634502557E-4 1.3001445891067607E-8-3.979050423241411E-9i 3.96796594619587E-9-1.1977594533923564E-9i -4.716452908016449E-10+2.243961135612641E-10i -6.209331455259957E-4 -2.058015104334012E-4 -4.646864825777949E-4 3.001329525462395E-11-1.000540390809912E-11i 9.6184...
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This document was uploaded on 01/24/2014.

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