H_75nm_L1_65um_D_2um_new

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Unformatted text preview: i 6.662215042562405E-11-2.0879493117679588E-11i -1.6649517648874805E-9+5.339466802349616E-10i -7.736433561748129E-4 -1.5388759220858123E-4 0 4.657093753013971E-13-1.0738092284496525E-12i 1.1259813436395594E-13-2.8468249014943494E-13i -2.7049676800304836E-10+9.080903608489044E-11i -7.769276203630196E-4 -1.1679535148120662E-4 -7.034030558248374E-5 7.491036867206822E-11-2.396405461602065E-11i 1.1044290455607465E-11-3.480995480979098E-12i -2.637681012033755E-10+8.873913299802377E-11i -7.869820347295508E-4 -1.5654082655700485E-4 0 2.634700391488298E-13-6.717099527320447E-13i 5.1488252726739266E-14-1.3880345972095673E-13i -1.9528601892630952E-11+7.441242555822664E-12i -8.00320713284289E-4 -1.5919406090542877E-4 0 7.941946355799442E-19-4.4231513722071525E-19i 1.5751016889316955E-19-8.961566597900442E-20i -2.4609957389172176E-18+1.3717638343843119E-18i -7.714669706881151E-4 -7.598525369336394E-5 0 8.741486747794705E-12-6.052654345741287E-12i 5.7155631718714964E-12-2.2385200597624555E-12i -1.7020225345830322E-9+5.457540095186676E-10i -7.714669706881151E-4 0 -7.5985253693364E-5 4.994282452054154E-10-1.5695444108815802E-10i 2.417517693479681E-12-7.130957142655093E-13i -1.6413176333462964E-9+5.270886332902161E-10i -7.719427334492885E-4 -4.7876956710983934E-5 -5.241424702249403E-5 3.4551385642844914E-10-1.0961707900854574E-10i 2.3880485315454967E-11-7.506390201138789E-12i -1.6667866943885924E-9+5.349228600976074E-10i -7.850014789458014E-4 -7.731832831956321E-5 0 1.7208427945021935E-12-1.3973436284630947E-12i 7.13447031402803E-13-2.7643618656837855E-13i -2.7004970031463637E-10+9.073939788653703E-11i -7.850014789458013E-4 0 -7.731832831956321E-5 8.072760099758733E-11-2.5828628733425725E-11i 2.499466271132908E-13-5.972740761512926E-14i -2.60620802550283E-10+8.789527005462792E-11i -7.85485588422083E-4 -4.8716903319948565E-5 -5.333379521587113E-5 5.57417335000434E-11-1.7957760464651698E-11i 3.7415291209044515E-12-1.152529777618382E-12i -2.648485699832565E-10+8.916728808372124E-11i -7.985359872034875E-4 -7.865140294576237E-5 0 2.8477099067438166E-13-5.369402720824819E-13i -1.2531017706130384E-14+2.3059772303481324E-15i -1.9409177987168672E-11+7.393012744988065E-12i -7.985359872034874E-4 0 -7.865140294576253E-5 6.308104172958861E-12-2.151361174283715E-12i 1.2916094589010972E-14+1.0697470929532509E-15i -1.8759295002875983E-11+7.255867629093092E-12i -7.990284433948776E-4 -4.955684992891319E-5 -5.4253343409248206E-5 4.338100445437792E-12-1.4358874191032233E-12i 2.6434899616142203E-13-6.342523526138341E-14i -1.9032784484320503E-11+7.321543570532805E-12i -8.120704954611738E-4 0 -7.998447757196198E-5 3.235164484880919E-19-1.8251428179672828E-19i 4.235596531745981E-21-1.2661780186991296E-21i -2.4068742683855213E-18+1.3569736890901913E-18i -8.120704954611738E-4 -7.998447757196198E-5 0 5.136282442323312E-19-2.8779923908264824E-19i 1.6296348278799608E-19-8.858451704603768E-20i -2.5600501238529033E-18+1.4326078154933633E-18i -8.125712983676721E-4 -5.039679653787782E-5 -5.5172891602625294E-5 1.3324428117812116E-19-7...
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This document was uploaded on 01/24/2014.

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