H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 6E-6i 8.568371832535423E-6-2.3181332980736747E-6i -1.4654296597435855E-5+5.326334688729063E-6i 1.776097671346637E-4 -1.4670708321683586E-4 -3.9756446749579965E-6 -6.620363394331237E-6+1.8521611082954779E-6i 7.845219275984303E-6-2.188481210905047E-6i -1.466794161896108E-5+4.989586264558649E-6i 1.8005912171718464E-4 -1.4487612350518698E-4 -2.127513915858448E-6 -8.036558151988787E-6+2.1152039162977815E-6i 6.3140684278103236E-6-1.7397915532477391E-6i -1.5321032990516204E-5+5.265270609454687E-6i 1.8330002644334256E-4 -1.4576724252471495E-4 0 -8.240964351371099E-6+1.873092483858424E-6i 3.2918835955176554E-6-8.297785045186278E-7i -1.6487445769645328E-5+5.541088916265507E-6i 1.8392858961862132E-4 -1.480474094163781E-4 0 -6.3728594498995754E-6+1.3491050861540304E-6i 2.7597773260676868E-6-6.508572890475987E-7i -1.6184934454281806E-5+5.329433356437955E-6i 1.850748514676396E-4 -1.5183788528040548E-4 -2.42194581760068E-6 -2.7372811410365847E-6+6.248607607853819E-7i 2.5790873006150705E-6-6.265587811712722E-7i -1.4777600347102164E-5+4.631305553451797E-6i 1.850287300541563E-4 -1.4981450943850206E-4 -1.5079089987506682E-6 -4.0795616695822314E-6+8.674164009581561E-7i 2.4454176469026743E-6-5.977913266227581E-7i -1.5834946804690653E-5+4.9920054902910516E-6i 1.837199426832257E-4 -1.5499999999999997E-4 0 -1.941355664669686E-7+4.091244374393455E-8i 1.0843761023116017E-6+3.9698294140855237E-8i -1.6808688108900615E-5+4.933557498121625E-6i 1.8461260489918607E-4 -1.536056242965139E-4 0 -1.3071710077601957E-6+2.3056005421517867E-7i 2.5068892907699944E-6-4.240727893590572E-7i -1.527513888326162E-5+4.819383589934954E-6i 1.8330305902919123E-4 -1.543030528763148E-4 -1.728123904085738E-6 -1.5724712201127301E-6+3.814741751523761E-7i 2.701028116805388E-6-5.618578043549427E-7i -1.5002921096372857E-5+4.639442773177645E-6i 1.7640055746874524E-4 -1.528347605549848E-4 -1.4316909682492499E-6 -2.401838884878108E-6+6.589986628757413E-7i 7.862490212714665E-6-1.8423406471165804E-6i -1.7296396445999616E-5+5.517828191229507E-6i 1.7605252646377226E-4 -1.5137626893462402E-4 0 -3.006071535819845E-6+7.964087215667642E-7i 9.67292254672154E-6-2.2786591516982898E-6i -1.64156049202843E-5+5.536429827289325E-6i 1.768472250677155E-4 -1.5024286667419324E-4 -2.634559050420577E-6 -4.3597735548766865E-6+1.2037760932930217E-6i 7.922808117039111E-6-2.0426227250622064E-6i -1.5406007380320548E-5+5.137517988970589E-6i 1.8107848809362185E-4 -1.5528310986014242E-4 -1.4401561271394584E-6 -1.0838287937391805E-6+2.8939387660868413E-7i 2.641528948576254E-6-5.240919993169626E-7i -1.6146338294848332E-5+4.871339103633303E-6i 1.8198128021499588E-4 -1.5499999999999997E-4 0 -1.966454502890421E-7+5.199051049860811E-8i 2.0693893818303963E-6-1.7668267292732706E-7i -1.8384285173803058E-5+5.337550367782666E-6i 1.841050698542534E-4 -1.5166223200552368E-4 0 -3.121178424886747E-6+6.007363378829345E-7i 2.7299875967068448E-6-5.4795019706121E-7i -1.5279799500549115E-5+4.948516512164827E-6i 1.836114037307238E-4 -1.528631547783215E-4 -2.257000472188...
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This document was uploaded on 01/24/2014.

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