H_75nm_L1_65um_D_2um_new

8031008836921438e 4 8478060581891317e 5

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Unformatted text preview: 4.418913568393634E-10i -5.23034765951534E-4+1.4463220012433147E-4i 1.9608468388089192E-6 9.287533907181975E-7 -2.4728664731530357E-7 4.2868944967230926E-5-1.1861592196103082E-5i 1.8330324369023968E-7-4.827585494785828E-8i -5.228091301231556E-4+1.4457071819945605E-4i 1.907378904364576E-6 1.5001600911965187E-6 0 5.438520600545282E-6-1.5632868001491662E-6i -1.2487019849751243E-7+3.3217646240484115E-8i -5.175506396715771E-4+1.4312155305592616E-4i 1.7202221800957461E-6 1.504644981439671E-6 -1.3475088187041021E-7 2.376450079713147E-5-6.607261584928066E-6i -1.0342951599091182E-7+2.8304878338975785E-8i -4.897450609158138E-4+1.3547005548271627E-4i 2.099628263233996E-6 1.357144213143375E-6 0 5.9522935348476684E-6-1.703267927607494E-6i -1.3039800401076268E-8+2.8746763012939395E-9i -5.476088867775731E-4+1.5139312826879515E-4i 2.1535584715429352E-6 1.4405780660214459E-6 -1.9299978493390052E-7 3.851243338355562E-5-1.0661941186612742E-5i 4.7384829267115897E-7-1.3096168326618116E-7i -5.548217680525394E-4+1.5337777323889715E-4i 2.1913618581214546E-6 1.61038393883975E-6 0 6.35745799658823E-6-1.8147519233642957E-6i 7.007881922908392E-9-4.4207756344505356E-9i -5.636634134410226E-4+1.5580946531295356E-4i 1.918965992545434E-6 1.6240352161821107E-6 -3.347874840509747E-7 5.632874289596525E-5-1.556669894562518E-5i 1.5104286531664873E-7-4.1802678428168316E-8i -5.148001629128627E-4+1.4236515721842988E-4i 2.0285032758243027E-6 1.7786238644243444E-6 0 5.941871228732724E-6-1.7018729795009735E-6i -2.0312035646045484E-8+2.4357845925434183E-9i -5.369293033766319E-4+1.4845239471725737E-4i 2.2878580803248178E-6 1.6872208552639214E-6 -2.4186348735543156E-7 5.024765437736112E-5-1.3890130671858422E-5i 9.575208307080851E-7-2.652817617786059E-7i -5.777473417363396E-4+1.5968465041277247E-4i 1.789085733518923E-6 1.736615102815982E-6 0 5.242073286458972E-6-1.5105427468247774E-6i -1.0595045240137001E-7+2.7072684599166955E-8i -5.003182077644355E-4+1.383783696277623E-4i 1.7059427068811135E-6 1.960699681641005E-6 -2.1578325505101088E-7 3.544467112664557E-5-9.822821707754333E-6i -2.958723952421002E-7+7.979146423928377E-8i -4.8630209790709203E-4+1.3452040435413474E-4i 1.582195676625174E-6 1.8500074979317003E-6 0 4.894284042341943E-6-1.4162982653289123E-6i -1.264814677320015E-7+3.283904077512932E-8i -4.714161316917403E-4+1.3042422382335733E-4i 1.5467688632533774E-6 1.6445330614884683E-6 -1.8246794700833574E-7 2.831994974964901E-5-7.862449378654133E-6i -3.2422471104626654E-7+8.91582845507045E-8i -4.656700878028573E-4+1.288442758527161E-4i 2.435145407513445E-6 5.0E-6 0 2.2668865081657923E-5-5.805112635861216E-6i 5.68770644846182E-6+1.1200424108899025E-7i -7.99950627969744E-4+2.1940676853414096E-4i 2.4192235831727703E-6 5.3639316833946245E-6 0 9.174482056740578E-5-2.3831310729767925E-5i 7.243546909427301E-5-1.867407257690375E-5i -5.9910800769254E-4+1.6660890981778662E-4i 2.5911789498492217E-6 5.067492617174534E-6 -3.2247985302865667E-7 1.45609152021541E-4-3.959106727060112E-5i 1.938722823258472E-5-4.573361588786305...
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This document was uploaded on 01/24/2014.

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