H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 9999999999998E-4 -7.538008168313546E-5 -2.0684190168181235E-7+6.37165355658149E-8i 4.866705820738041E-6-1.5293939847840011E-6i -1.7244865008890931E-6+5.177950321995882E-7i 1.6826038312289893E-4 -1.9999999999999998E-4 -1.2438364546929115E-4 -1.0841195666831464E-6+3.3796996157696503E-7i 3.3959647112011375E-6-1.0501767589506415E-6i -2.483588772422428E-8-4.486005281476154E-9i 2.843749435816766E-4 -1.8322141527180784E-4 -7.70107408845635E-5 -1.323578670251119E-6+4.0817221945485387E-7i 1.2916530509464886E-6-3.923129645987816E-7i -1.4263378400861734E-6+4.34895664237707E-7i 3.0E-4 -1.801696851480993E-4 -7.133033650647898E-5 -1.1511915031278576E-6+3.5384622080488645E-7i 1.0234785135972212E-6-3.0944278224132734E-7i -1.4246498496054858E-6+4.341931564303932E-7i 3.0E-4 -1.9999999999999998E-4 -5.6677043770315585E-5 -7.626920007771555E-7+2.3494317281386227E-7i 7.47272184037179E-7-2.259421849606196E-7i -1.4620401812667469E-6+4.468355868159633E-7i 3.0E-4 -1.3044186072868846E-4 -2.2372417639977657E-5 -8.652051891452104E-7+2.6236901531501855E-7i 5.478441597322217E-7-1.6134312781620452E-7i -3.087619720642029E-6+9.404519704465572E-7i 2.8347493078195865E-4 -1.3272390787182758E-4 -3.61360544482185E-5 -1.6244645001790107E-6+4.970957962097256E-7i 1.1208991035947964E-6-3.3505903015711854E-7i -3.317377588002923E-6+1.0114373537096229E-6i 2.76611397590031E-4 -1.6171724455367814E-4 -7.000594900754569E-5 -1.8169357184789242E-6+5.599187677646114E-7i 1.613912584852213E-6-4.894390067343459E-7i -1.8629495148992432E-6+5.675138075659077E-7i 2.741820822353239E-4 -1.5030632476446844E-4 -5.133286027123003E-5 -1.8559710877508013E-6+5.715830621881073E-7i 1.5329195000999393E-6-4.632510481579602E-7i -2.6733366690204493E-6+8.157782799846182E-7i 2.8282444380529323E-4 -1.7509645344170692E-4 -5.4619143584632336E-5 -1.2329783023779981E-6+3.8017856931718727E-7i 1.1512228635972833E-6-3.4865407076183825E-7i -2.0017906165481026E-6+6.115310934009069E-7i 3.0E-4 -1.744145946649334E-4 -4.234691425193612E-5 -8.639049040135054E-7+2.651620579920091E-7i 7.337598563095328E-7-2.2040556971388328E-7i -1.9649061637582207E-6+5.997668152127883E-7i 1.9781943280112576E-4 -1.9999999999999998E-4 -1.2214668518160406E-4 -1.360409198282402E-6+4.2402819889937513E-7i 2.8728043946153E-6-8.857907683937934E-7i -2.695669916607831E-7+7.427328129324083E-8i 1.8095826243219547E-4 -1.8734017908833314E-4 -1.1918082088122574E-4 -1.5454202552956509E-6+4.817667865656718E-7i 3.709258339355077E-6-1.1459033929156915E-6i -5.137042237207332E-9-1.2674989100826262E-8i 1.81126750355464E-4 -1.9999999999999998E-4 -1.0446193538925751E-4 -1.3390067577730798E-6+4.20071245883093E-7i 3.437214767434503E-6-1.0653581623732513E-6i -6.609778030793255E-7+1.9298717364509794E-7i 1.9066133343039225E-4 -1.7568634456956733E-4 -1.1522435898966608E-4 -2.0101550014122916E-6+6.263273621056605E-7i 3.994933968210502E-6-1.2322289338233538E-6i 2.5233234528151847E-8-2.3831451636743828E-8i 2.1970038613168617E-4 -1.7434564704978632E-4 -1.1725775506875967E-4 -2.1047377641381067E-6+6.5309832...
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This document was uploaded on 01/24/2014.

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