H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 1242581718639037E-8+1.3261487264866457E-8i -2.7360421668088178E-9-5.035688888302183E-9i -8.145374730957262E-6+2.5566162709145954E-6i 1.3766196472144416E-4 1.8460340901766024E-4 -8.665928156266392E-6 -3.384308104197548E-7+1.1882913069436941E-7i -2.073847560480906E-6+6.539658313338371E-7i -8.905664358425144E-6+2.8024101761186783E-6i 1.302096195755373E-4 1.772071068916114E-4 0 1.308076384692186E-8+8.713053728862107E-9i 7.420397397928102E-8-2.793222785985039E-8i -1.1817380878793166E-5+3.729754392838708E-6i 1.359411628089361E-4 1.8529760635804232E-4 0 1.306662179671736E-8+6.7980590860446885E-9i 1.0224512864022698E-7-3.727189367876369E-8i -9.159413495500582E-6+2.8821570597002403E-6i -5.101083000961311E-5 1.8525792154122872E-4 0 1.1182349481649622E-9-1.3949209527181141E-9i -5.9775185645543994E-9+1.0979891194043734E-8i -2.8130986529008386E-6+8.186434574537924E-7i -5.9841961384587375E-5 1.9999999999999998E-4 0 -4.8925165333120465E-9+9.735012351796967E-10i 6.29651549649557E-11+7.339319567541136E-9i -2.253585884077236E-6+6.594029585338591E-7i 5.014790546413575E-5 2.0E-4 -1.8082114539413094E-5 6.064021947434701E-7-1.921416582545893E-7i -1.6889793541376785E-6+5.331345491641352E-7i -5.032553123601862E-6+1.5607770423187092E-6i 4.34342149815163E-5 1.816935075417102E-4 -2.60715434700643E-5 1.5301763678681763E-6-4.914013838821108E-7i -3.349018456579177E-6+1.0497939413774172E-6i -5.8796037169292205E-6+1.8261773393789927E-6i 6.097394373275832E-5 1.8332342303628658E-4 -1.688141006917412E-5 9.848677177635093E-7-3.157738113831211E-7i -3.015019190300469E-6+9.498164608009064E-7i -7.373898947346554E-6+2.3017965957294798E-6i 3.7718796851455785E-5 1.9999999999999998E-4 -3.179390707127829E-5 9.852138169479002E-7-3.15213735518225E-7i -2.33207810681948E-6+7.302033091443776E-7i -4.048563956661714E-6+1.248822961849361E-6i 5.193827120996601E-5 1.8422304125024366E-4 0 7.881046936523046E-9+5.7516247950704464E-9i -3.427225334510023E-8+2.0346656274646108E-8i -7.555783160485819E-6+2.351457252389612E-6i 3.898410720633146E-5 1.836815803608336E-4 0 -1.2689947155566643E-8+1.0742628343111897E-8i -1.0398405436950234E-8+1.4316826148958836E-8i -6.795018488822546E-6+2.10722935210456E-6i 4.6922326160645695E-5 1.8369035538379737E-4 -1.3842930441595162E-5 8.670473805141241E-7-2.744937697731932E-7i -2.0335919470680845E-6+6.398101887266305E-7i -6.811691273858791E-6+2.117852587254083E-6i 6.0601028127539216E-5 1.9999999999999993E-4 0 -7.220612444908357E-8+3.0560909351484235E-8i 1.0565909867274269E-7-2.7005302175129332E-8i -5.822190741137859E-6+1.8128286257700449E-6i 3.0062711203074946E-5 1.9999999999999998E-4 -1.7548589320610217E-5 6.121758051068739E-7-1.939457568870661E-7i -1.2781027414327353E-6+4.025035030711129E-7i -4.401753383874809E-6+1.3574572996095697E-6i 1.2759695389526063E-5 1.8331513387106674E-4 -1.5226343214490577E-5 7.601058498600004E-7-2.4248572395790706E-7i -1.2004767693261192E-6+3.7733707839330927E-7i -5.013313827256659E-6+1.5411225188101704E-6i 4.1211253490945244E-5 1.9999999999999993E-4 0 -6.81805251...
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This document was uploaded on 01/24/2014.

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