H_75nm_L1_65um_D_2um_new

840269690013572e 7 8121500278111847e 6

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Unformatted text preview: E-4 0 5.018503541951521E-8+2.1595026361137954E-8i 8.180029253466246E-7+3.171947766388404E-7i -2.158430067384137E-6+7.162073306615453E-7i -1.068669665402783E-4 -1.4773663402698956E-4 -2.176589553504383E-6 8.416355880100238E-8-4.813130979818488E-10i 7.781977174083287E-7+2.8553531169651634E-7i -2.260443448691387E-6+6.241855392677463E-7i -1.0284402840298097E-4 -1.4793257947760683E-4 0 3.106504150892404E-8+1.2822977609922213E-8i 8.825076417769933E-7+3.5152960201960205E-7i -2.33332321616252E-6+6.632002348266639E-7i -1.1944017631656643E-4 -1.4757691181756724E-4 -3.2986839064484304E-6 1.1635982058019244E-7+1.0463561880011754E-9i 6.770723304429467E-7+2.380903085829463E-7i -1.9990818654833147E-6+5.447973915843252E-7i -1.1852604938113984E-4 -1.4842785442115313E-4 0 4.6797054892068944E-8+1.730814286424881E-8i 8.089906029764565E-7+3.212085297960368E-7i -2.0348783103374703E-6+5.427427983575487E-7i -1.2647251061110074E-4 -1.4416008688753937E-4 -3.579408506130206E-6 1.4657137041268103E-7+1.1385034915209172E-8i 6.243178605628439E-7+2.1372353970981306E-7i -1.7947587155814252E-6+5.608035095952304E-7i -1.242133598882282E-4 -1.387099391504117E-4 0 1.1752554174104307E-7+4.560837739199393E-8i 6.550681298913803E-7+2.448392319908159E-7i -1.7170970035024236E-6+6.641681982637022E-7i -1.1470412039913343E-4 -1.4812900507322203E-4 -3.705080023952274E-6 1.191455724448434E-7-5.824376428330157E-9i 6.880567961042624E-7+2.3750185859772184E-7i -2.1085027926714042E-6+5.605889075819181E-7i -1.1619528781150698E-4 -1.493041563504545E-4 0 3.9840234189805757E-8+1.4480666565462975E-8i 8.368371628729916E-7+3.3506963306902116E-7i -2.121738042142509E-6+5.321476590029342E-7i -1.1377500701054414E-4 -1.4827262182752485E-4 0 4.340280012255816E-8+1.6352980619117886E-8i 8.367151845918662E-7+3.322351742406082E-7i -2.1185961715718354E-6+5.770453709920552E-7i -1.174971158320589E-4 -1.5068822150007013E-4 -2.0766985434193536E-6 7.414368626242534E-8-1.5536465612492396E-10i 7.13300293033352E-7+2.6846101574348517E-7i -2.1724974128739473E-6+4.7483970236425446E-7i -1.6166836632286772E-4 -1.391195117743479E-4 0 1.955691129132097E-7+7.496304544625332E-8i 3.2969486945514624E-7+1.2682412620698172E-7i -1.2471124609373207E-6+4.4000393884239747E-7i -1.6429300031363557E-4 -1.3257997300418595E-4 -4.5918000407982955E-6 2.9801273891978523E-7+7.485731226102971E-8i 2.6078751308168296E-7+8.02064122971144E-8i -1.245672846209794E-6+4.404817984617168E-7i -1.5991608795597501E-4 -1.4800428814292518E-4 0 8.935837887452842E-8+3.3718201853782244E-8i 4.1837444757942146E-7+1.7056093168446583E-7i -1.3614869938586332E-6+3.7041834421080684E-7i -1.6266341789246234E-4 -1.4903823490430731E-4 0 7.935680396229522E-8+3.0053618403327565E-8i 3.9397677486296853E-7+1.6313547407714888E-7i -1.3499800614343545E-6+3.4682034721701775E-7i -1.6309691219814184E-4 -1.4793628010537484E-4 -3.483834852339297E-6 1.36220927579155E-7+2.4604293523393805E-8i 3.200514910804791E-7+1.1428240788328254E-7i -1.3352545199537284E-6+3.503073675719719E-7i -1.5949979443545529E-4 -1.497250...
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This document was uploaded on 01/24/2014.

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