H_75nm_L1_65um_D_2um_new

872151839616214e 6 463627513999553e 6 0

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Unformatted text preview: 654744047132544E-7-1.1979575359847653E-7i -3.094692483843076E-5+9.6923548156883E-6i 9.928866966407589E-5 1.5901302936989581E-4 -2.8767861418057436E-6 2.855961754050923E-7-8.656708274784547E-8i -6.754349810227039E-6+2.0789922976987846E-6i -2.7209413699218867E-5+8.57704200125819E-6i 1.0160401017214389E-4 1.569570783458975E-4 0 -1.8324061781260781E-7+7.229648319451165E-8i 7.37514917411447E-7-2.0351410437505212E-7i -3.728966459698077E-5+1.1630900421897266E-5i 1.0187902203634937E-4 1.579785016314213E-4 -2.4591940405086006E-6 2.1582319031319037E-7-6.249848883653023E-8i -8.017391586820354E-6+2.4456229233934165E-6i -3.0170463524140793E-5+9.502290048165005E-6i 1.0259182880093452E-4 1.5905862662913628E-4 0 5.267689785759533E-8+3.83576033158306E-9i 1.6980999938409625E-7-4.8090507970277586E-8i -2.977180283908823E-5+9.351926850048597E-6i 1.0916208694555274E-4 1.588552388396621E-4 -2.22322277839126E-6 5.3725060914440655E-8-4.052122924529111E-9i -5.981160326629346E-6+1.838498826555001E-6i -2.9019512034207116E-5+9.156725641251448E-6i 1.0813467420850918E-4 1.593877712344836E-4 0 -9.919467840180386E-9+2.276165325526547E-8i 1.2775336938886105E-7-3.876094082366777E-8i -2.9073117279660827E-5+9.154644098985587E-6i 1.1049608128617097E-4 1.5867991184845674E-4 0 -2.4665961214188525E-8+2.691406980867309E-8i -6.166684825029387E-8+1.5489270529068688E-8i -3.121333316585565E-5+9.813390727354442E-6i 1.1092516022377462E-4 1.5704261283652223E-4 -1.641618021080971E-6 4.390973771775355E-8+1.7672549426947823E-9i -8.22619972818853E-6+2.476182965028643E-6i -3.53457354876352E-5+1.1098649199133775E-5i 1.1203547434733708E-4 1.5685408308576169E-4 0 -1.9221393493529249E-7+7.680929875464315E-8i 1.0387755800922438E-6-2.9990322878981067E-7i -3.907844068469814E-5+1.21938040662218E-5i 1.1537592566030534E-4 1.5633978038370023E-4 0 1.462207228630774E-7-1.834513679237975E-8i -4.435983963028504E-8+9.22719674124729E-9i -4.2798774125780405E-5+1.3300898080725109E-5i 1.163144252817513E-4 1.561558128006205E-4 -1.960198630627197E-6 -1.4563687743823542E-7+6.39854534201805E-8i -1.2280563226758565E-5+3.683746138688724E-6i -3.668006313437694E-5+1.1544902193458736E-5i 1.1383703301238738E-4 1.5675384731659577E-4 0 -9.367402986071305E-8+4.739265490050215E-8i 1.0246724806678432E-6-2.925841788514738E-7i -3.911741755476809E-5+1.2218632936017153E-5i 1.1417704381400622E-4 1.5688310926637592E-4 -2.2154971620336644E-6 -8.288549862873074E-8+4.1841807912543216E-8i -1.018654392639313E-5+3.0821947607280074E-6i -3.4130563531832255E-5+1.0748504655237073E-5i 1.1301397104889434E-4 1.584841165104736E-4 0 -2.7745951455363887E-8+2.8286196741370933E-8i 4.4383202602576766E-7-1.3459359503685311E-7i -3.229930523675206E-5+1.0139426332507936E-5i 1.1211697863442187E-4 1.585111680259045E-4 -2.89935370207114E-6 -1.3818425052593748E-8+1.827317921490601E-8i -8.005016523917526E-6+2.46216532516913E-6i -2.882134824569813E-5+9.110297148003793E-6i 1.1250192576785101E-4 1.603580712911983E-4 0 1.0090725761913166E-8+1.6033658525871353E-8i -9.388650850196033E-8+2.5...
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This document was uploaded on 01/24/2014.

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