H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 594412496315265E-6-4.6669939960636395E-7i 2.5289920738739968E-6-7.62882626743099E-7i 3.0075401624817394E-5 -9.598553193425958E-5 -1.9999999999999998E-4 1.9214276782701376E-6-6.024438209404581E-7i 2.274953872977662E-6-6.822323929225308E-7i 3.0557955808515786E-6-9.275348786946848E-7i 9.559522960499595E-5 -1.1099540671261914E-4 -7.335158974183641E-4 5.112914059469272E-9-2.1684484663237437E-9i 3.688995029649914E-8-1.1176384149341104E-8i 1.6174191535828949E-7-4.904040403827887E-8i 9.869967274996442E-5 -9.156867016725855E-5 -7.020171708481038E-4 4.658523152633512E-9-2.106764463995274E-9i 3.656132941884883E-8-1.107718857590083E-8i 1.8772650734528484E-7-5.692851393090922E-8i 1.509295393163538E-4 -1.1756119112855144E-4 -7.231207648119289E-4 -1.3806683564121588E-8+3.5753347928613236E-9i 4.097035909558159E-8-1.2420123450214447E-8i 1.6497564556641688E-7-5.0099408129270094E-8i 4.3840115925696214E-5 -1.1967341891584086E-4 -7.370619492557017E-4 2.094499010228558E-8-6.955416839890728E-9i 3.705219540467735E-8-1.121592123783197E-8i 1.5350589854488324E-7-4.646981581648115E-8i 6.374219959668528E-5 -1.7502930338629278E-4 -7.244347278717974E-4 1.4517237407585754E-8-4.996089098735301E-9i 5.538657620024317E-8-1.6773633895063872E-8i 1.4943489050979817E-7-4.526899689010334E-8i 1.1970462288897009E-4 -1.5632064303087567E-4 -7.216222417729533E-4 -3.78072837340739E-9+5.413887236627283E-10i 5.190520365330539E-8-1.5731728146201716E-8i 1.583656207387528E-7-4.805721973335229E-8i 1.5649706442762536E-4 -1.606837118142181E-4 -7.135778959462945E-4 -1.6419523679329037E-8+4.379744444367189E-9i 5.473635485954899E-8-1.6596588476184066E-8i 1.5915783762090704E-7-4.8346686582882456E-8i -1.1970274803846681E-4 -4.382435323817896E-5 -7.370581240141745E-4 6.288825535690695E-8-1.9589083975278233E-8i 1.2330996372313742E-8-3.7207476407398976E-9i 1.278756040266733E-7-3.84681230949672E-8i -5.1845104709751824E-5 -5.1845104709751824E-5 -7.443978574897093E-4 4.70184161781735E-8-1.4826498139363469E-8i 1.514441417530291E-8-4.577543637673388E-9i 1.4189145912640837E-7-4.2807824129555045E-8i -7.332003104138756E-5 0 -7.443978591322987E-4 5.216355351740471E-8-1.6374526604590188E-8i -2.954897911730089E-10+8.952057695673422E-11i 1.387805903886481E-7-4.1831940116767457E-8i -8.746350557598192E-5 -8.171296840344988E-6 -6.754065644678836E-4 7.863059232723714E-8-2.4518460802446677E-8i 2.7104095952373383E-9-8.164300194750005E-10i 1.7189767308715906E-7-5.174332074977475E-8i -1.1099207479081495E-4 -9.54657482156608E-5 -7.335332645839953E-4 6.02636072453296E-8-1.8796259938816734E-8i 2.5895203714556E-8-7.816901433701576E-9i 1.2660326429471216E-7-3.809890637924883E-8i 0 0 -7.479999999999999E-4 3.4204988281791255E-8-1.0971608657936132E-8i -9.125372388593893E-11+2.76569021184127E-11i 1.532604724215469E-7-4.6323694361998377E-8i 0 -7.332006935684286E-5 -7.443978553583874E-4 3.346941092305121E-8-1.0744405643435559E-8i 2.224717159872697E-8-6.7300521699652455E-9i 1.5090435976591715E-7-4.561405584714249E-8i 1.5099549942815739E-5 -2.338126874...
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This document was uploaded on 01/24/2014.

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