H_75nm_L1_65um_D_2um_new

9331908406092693e 4 11129565090273328e 4 0

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Unformatted text preview: 56E-6+3.0862619958023314E-7i -1.1352954389614225E-4 5.000000000000003E-6 7.500000000000002E-8 -9.714685458633507E-9-7.718327045798787E-9i -2.167777377692363E-7-2.33698118104219E-7i -5.57455701716185E-6+3.6167268256939013E-7i -1.1444467892660152E-4 3.629315453422934E-6 0 7.148218300801087E-9-3.885503749132832E-10i 6.163887312254607E-9+1.1195061239023336E-8i -4.767488199942663E-6+6.792792244405933E-7i -1.1524501046811026E-4 5.000000000000002E-6 0 -1.1995542900954811E-8+8.260992854145575E-9i -3.4215294287820864E-7+7.888885659453477E-8i -5.377498771393652E-6+2.894736997055202E-7i -1.1524509857410814E-4 5.000000000000003E-6 7.500000000000004E-8 1.9695219903445286E-9+4.089185920362853E-9i -1.436193815976464E-7-2.1596517693786393E-7i -5.425765668378822E-6+3.5350828970636326E-7i -1.1696065325207401E-4 5.000000000000002E-6 7.500000000000002E-8 -2.0393638259017677E-8-4.7233710903711E-10i -1.5427318361631123E-7-2.051796801121294E-7i -5.309994133340524E-6+3.380677225226543E-7i -1.1696057295975194E-4 5.000000000000002E-6 0 -1.0421615954077329E-8-1.9251638411332818E-8i -3.341349683633342E-7+8.569086948263118E-8i -5.16010780405829E-6+3.0691551999998274E-7i -1.1604445247764941E-4 4.1563111250035185E-6 1.6659929581418292E-7 -8.126310817369278E-9-8.29951311024998E-9i -1.3111191916517387E-7-8.3613334389717E-8i -4.890571012491906E-6+5.437160345831598E-7i -1.1308748262005007E-4 4.109265089663842E-6 1.3842234483855904E-7 4.246944962711012E-8+2.9553117051702144E-8i -1.6513117831720628E-7-5.217421525258279E-8i -5.064823020348218E-6+5.735708984773876E-7i -1.2727631127539387E-4 -4.999999999999999E-6 7.5E-8 5.461714221920112E-9-3.072162245031009E-9i 2.5913131441452185E-7+2.137948594341937E-7i -4.623795245580294E-6+3.1635573216702466E-7i -1.315691726130054E-4 -6.3422244251363266E-6 7.500000000000001E-8 -4.096575048056446E-8-1.7072079479042012E-8i 1.036977478152094E-6+3.930285362276061E-7i -3.723465523967703E-6+6.029902341238392E-7i -1.290904257114997E-4 -3.707632023398397E-6 1.1954869352064547E-6 -5.748435625109164E-8+7.015361070773115E-9i 1.6346094192297933E-7+6.890171438757668E-8i -3.870227315463727E-6+5.743582953445266E-7i -1.288286049095531E-4 -1.113462064400401E-6 0 4.0886559657392384E-9-1.1055208583531085E-9i 4.3967544546266435E-10-4.4270736445714966E-10i -3.769513671898679E-6+6.196383045551817E-7i -1.2998117924012902E-4 -6.8940030364504385E-6 7.500000000000002E-8 -2.2538058012898093E-8-1.297575731748989E-8i 1.0483556689593132E-6+3.989677107676486E-7i -3.6492315534494354E-6+6.684070245654871E-7i -1.2892251247339335E-4 -6.039144750611772E-6 1.1450695471871373E-6 -6.229104383071709E-8+1.638614981682861E-9i 7.378392832480672E-7+2.932298041242109E-7i -3.864234165695569E-6+6.052777780730435E-7i -1.2687881908988422E-4 -4.730934478515574E-6 1.7032023395244273E-6 -9.110985983101377E-8+8.545259751155555E-9i 3.7004269714295014E-7+1.560951865912754E-7i -3.997859536589539E-6+5.89730872782257E-7i -1.263660753059919E-4 -6.1406737883403824E-6 7.500000000000001E-8 -1.1705031040103258E-8-...
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This document was uploaded on 01/24/2014.

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