H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 0066615809E-6+1.2687177912251713E-6i 6.185160142567019E-7-2.0166973945338432E-7i -9.309276571633461E-5+2.8658555360045148E-5i 1.87E-4 7.905705386432444E-5 0 9.135409918964238E-7-8.396191933481887E-7i -1.7484970318127544E-6+4.315954754273866E-7i -1.5839878159221166E-4+4.785579866182591E-5i 1.87E-4 8.07758590992329E-5 7.500000000000002E-8 3.1070213631932984E-5-8.923232064781282E-6i 7.626651921373141E-7-2.366219875420128E-7i -1.4987839622925117E-4+4.5433149598016765E-5i 1.8700000000000002E-4 7.904930000406596E-5 7.5E-8 2.8398553110003502E-5-8.16825320888276E-6i -1.8275097655649577E-6+4.798108010747473E-7i -1.596454005234862E-4+4.829383107422152E-5i 1.8794127494316487E-4 7.948723353991483E-5 1.1335402827212598E-7 1.47939190002222E-5-4.253443303459115E-6i 4.486825206040379E-6-1.301288723720706E-6i -1.1834055861980816E-4+3.616936524646758E-5i 1.8898835015369907E-4 8.163735772640418E-5 0 -2.1012379997448005E-6+6.053342095837433E-7i 8.839669619476504E-8-5.03905359170482E-8i -8.423987031873333E-5+2.609830306162831E-5i 1.8700000000000002E-4 8.25033118906183E-5 7.5E-8 3.637066267497298E-5-1.0392207961489793E-5i 5.575463307705419E-7-1.9145623592758954E-7i -1.4576505823580616E-4+4.416634720597038E-5i 1.8700000000000002E-4 8.078715073003387E-5 0 5.347559335415314E-7-7.013319960313607E-7i 2.8257405755452523E-7-9.560545574010051E-8i -1.527446915607772E-4+4.612060041966903E-5i 1.8595018196931336E-4 9.761046027809685E-5 1.4177882976819742E-6 4.3128818130109874E-5-1.2599801906256388E-5i 3.930718656629366E-6-1.2544600767235476E-6i -6.48743816375139E-5+2.0387950737059863E-5i 1.8502911292181658E-4 9.542113647454173E-5 7.500000000000001E-8 6.746963911974813E-5-1.9563090839456944E-5i 3.0086017218391666E-6-9.517518462322022E-7i -6.611681369068697E-5+2.1399375571157544E-5i 1.851247014897472E-4 9.722053722464519E-5 7.500000000000001E-8 6.16490551931248E-5-1.7877781938620968E-5i 3.042060631425203E-6-9.623825506510642E-7i -5.9727000666413084E-5+1.9514261007868198E-5i 1.832770574896296E-4 9.884216113016741E-5 7.500000000000001E-8 5.759464750078167E-5-1.7223035705981653E-5i 5.5828658783786555E-6-1.7653046393574638E-6i -4.653896031566956E-5+1.5746556594958635E-5i 1.8560916568942466E-4 8.848507116970025E-5 7.500000000000001E-8 7.868874272765456E-5-2.283582346939071E-5i 3.591102554378889E-6-1.0909636392093208E-6i -8.101212191158475E-5+2.605990228982065E-5i 1.8646131388970661E-4 8.99700451933128E-5 1.094227852988202E-6 4.845892098365593E-5-1.4157971137340488E-5i 3.1657375275233197E-6-1.0068627129487933E-6i -8.823153546208361E-5+2.7370954104545414E-5i 1.8520495196932483E-4 9.20337956716229E-5 7.5E-8 7.183618784025872E-5-2.0890934752425482E-5i 2.897694307037315E-6-9.135632311444978E-7i -7.370551762432666E-5+2.3753095951633274E-5i 1.85007124715654E-4 9.029080313878768E-5 7.500000000000001E-8 7.367376672341135E-5-2.1622765393292942E-5i 3.0574100492246404E-6-9.774370452462985E-7i -6.953355874037871E-5+2.2716419517594756E-5i 1.8906250219997164E-4 8.500382507849528E-5 0 -7.201280064498015E-6+2.01331535158...
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This document was uploaded on 01/24/2014.

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