H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 5351108667361E-5i 3.0339102483143623E-5-8.457077147437023E-6i -1.564449309089875E-4+5.037884597662009E-5i 4.028375895488999E-5 -4.205965274674494E-5 -1.8135292058767742E-6 2.104702043227184E-4-6.290471945975434E-5i 3.657937617402334E-5-1.0257101594916712E-5i -1.6127255322679677E-4+5.029920887084036E-5i 4.087821788573686E-5 -4.0463499829703E-5 0 2.7031443901473354E-4-8.069858916247286E-5i 3.7160756961490685E-5-1.033168744394063E-5i -1.6066285214993387E-4+5.1595356109394736E-5i 4.123639720741225E-5 -4.54422195956374E-5 -1.7306099427611915E-6 1.9605746907116973E-4-5.941763747298243E-5i 3.6581406205570524E-5-1.0361527310842157E-5i -1.3092274086932547E-4+4.1561033542351375E-5i 3.8975889586446206E-5 -4.984370026280951E-5 0 2.156540448385036E-4-6.30776398709902E-5i 1.1362271992742693E-5-3.1853381477764398E-6i -1.7386792967824763E-4+5.516963013476363E-5i 4.08240072259472E-5 -4.87029817899468E-5 -1.716827477755018E-6 1.7664709587409408E-4-5.354736131525E-5i 2.9786975229140315E-5-8.49114713956436E-6i -1.2881078105359431E-4+4.093064704540453E-5i 4.0937232990174555E-5 -5.062748399789062E-5 0 1.9826484286080323E-4-5.994464135164468E-5i 2.320178752478544E-5-6.581839754071552E-6i -1.2682270888182053E-4+4.1434762817236084E-5i 3.9027876314418536E-5 -5.06117572429657E-5 -1.7202173219102617E-6 1.520489302040194E-4-4.533283426784128E-5i 1.937737197264394E-5-5.5287977552831435E-6i -1.5730179356752183E-4+4.8949762170429676E-5i 3.795795313137705E-5 -4.9076215672315194E-5 -2.1624637631943894E-6 1.2820955407438718E-4-3.804048945258303E-5i 1.7799897093726195E-5-5.0681880570476645E-6i -1.7450730582352144E-4+5.3366431684763995E-5i 4.3092001913472066E-5 -4.435836874957848E-5 0 2.3388797574096188E-4-7.193948159127943E-5i 4.645964365734921E-5-1.3171062784895528E-5i -1.0679036399844536E-4+3.531715056488725E-5i 4.077055328678864E-5 -3.762169679966064E-5 0 3.007138551482319E-4-8.919966916461082E-5i 4.1863572523429993E-5-1.1583344742012746E-5i -1.7666456595482626E-4+5.633160845045205E-5i 4.314213901810375E-5 -3.9239503243157095E-5 0 2.7419751144219036E-4-8.375421094628344E-5i 6.050533559056827E-5-1.6998053666000065E-5i -1.1681329446602576E-4+3.8254578153912965E-5i 4.029092852477088E-5 -3.946331850015671E-5 -1.7015148202289004E-6 2.3226877348074808E-4-6.908821654683026E-5i 4.124743630549935E-5-1.1516643373989717E-5i -1.7325175209840748E-4+5.382472037465738E-5i 4.326308813403859E-5 -3.366931349894216E-5 0 3.330049069722141E-4-1.0084127955778147E-4i 8.564160487613775E-5-2.387066142893342E-5i -1.2600940695261904E-4+4.086916094222781E-5i 4.358002072984275E-5 -1.921110758433094E-5 -3.3254486453105203E-6 4.4746835514906783E-4-1.309786533619468E-4i 2.75677065487223E-4-7.543416364517555E-5i -9.007315472767623E-5+2.765339200138964E-5i 3.934776230424724E-5 -3.17867014631012E-5 -2.317225210618796E-6 2.675684859260457E-4-7.815838702769871E-5i 5.836640209228103E-5-1.6096958073439268E-5i -2.3449177524772076E-4+7.054196181751326E-5i 4.427975193016634E-5 -3.677411743498819E-5 0 2.9321736579795E-4-9.010748829459971E...
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This document was uploaded on 01/24/2014.

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