a gas chromatograph air analyzer fabricated on a

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Unformatted text preview: boratory UC-Berkeley, ME Dept. anisotropic 38 Peterson, “Fabrication of an Integrated, Planar Silicon Ink-jet Nozzle,” IEEE Trans. On Electron Devices, ED-26, 1918-1927, 1979. Inkjet Nozzle Liwei Lin, University of California at Berkeley Microsystems Laboratory UC-Berkeley, ME Dept. anisotropic 39 Tseng et al, “Optical Bends and Ring Fabricated by Preferential Etching,” Appl. Phys. Letter., Vol. 26, 699-702, 1975. Microsystems Laboratory UC-Berkeley, ME Dept. Optical Bench anisotropic Laser resonator cavity Liwei Lin, University of California at Berkeley 40 Terry et al., “A Gas Chromatograph Air Analyzer Fabricated on a Silicon Wafer,” IEEE Trans. On Electron Devices, ED-26, 1880-1886, 1979. Gas Chromatograph Liwei Lin, University of California at Berkeley Microsystems Laboratory UC-Berkeley, ME Dept. anisotropic 41 Tuckerman and Pease, “High-Performance Heat Sinking for VLSI,” IEEE Trans. On Electron Devices Lett., Vol. EDL-2, 126-128, 1981. Miniature Coolers Liwei Lin, University of California at Berkeley Microsystems Laborat...
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This note was uploaded on 02/03/2014 for the course ME 119 taught by Professor Lwlin during the Spring '08 term at University of California, Berkeley.

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