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Class26 - Microsystems Laboratory UC-Berkeley ME Dept...

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Microsystems Laboratory UC-Berkeley, ME Dept. 1 Liwei Lin, University of California at Berkeley Introduction to MEMS – Class#26 Liwei Lin Professor, Dept. of Mechanical Engineering Co-Director, Berkeley Sensor and Actuator Center The University of California, Berkeley, CA94720 e-mail: [email protected] http://www.me.berkeley.edu/~lwlin
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