Ke peterson silicon as a mechanical material the proc

Info iconThis preview shows page 1. Sign up to view the full content.

View Full Document Right Arrow Icon
This is the end of the preview. Sign up to access the rest of the document.

Unformatted text preview: ory UC-Berkeley, ME Dept. anisotropic 42 Microsystems Laboratory UC-Berkeley, ME Dept. Summary Bulk micromachining is introduced Isotropic etching of silicon is briefed with demonstration examples Anisotropic etching of silicon is explained with practical device examples Other silicon etching techniques are summarized Liwei Lin, University of California at Berkeley 43 Microsystems Laboratory UC-Berkeley, ME Dept. Bibliography M. Madou, "Fundamentals of Microfabrication," CRC Press, 1997. G.T.A. Kovacs, "Micromachined Transducers - Sourcebook," McGraw-Hill, 1998. K.E. Peterson, “Silicon as a Mechanical Material,” The Proc. of IEEE, Vol. 70, 420-457, 1982. R.C. Jaeger, "Introduction to Microelectronics Fabrication," AddisonWesley, 1988. S.M. Sze, "Semiconductor Sensors," John Wiley & Sons, Inc, New York, 1994. W.S. Ruska, “Microelectronic Processing,” McGraw-Hill, 1988 Liwei Lin, University of California at Berkeley 44 Microsystems Laboratory UC-Berkeley, ME Dept. LIGA Proc...
View Full Document

Ask a homework question - tutors are online