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UC-Berkeley, ME Dept. anisotropic 42 Microsystems Laboratory
UC-Berkeley, ME Dept. Summary Bulk micromachining is introduced Isotropic etching of silicon is briefed with
demonstration examples Anisotropic etching of silicon is explained
with practical device examples Other silicon etching techniques are
Liwei Lin, University of California at Berkeley 43 Microsystems Laboratory
UC-Berkeley, ME Dept. Bibliography M. Madou, "Fundamentals of Microfabrication," CRC Press, 1997.
G.T.A. Kovacs, "Micromachined Transducers - Sourcebook,"
K.E. Peterson, “Silicon as a Mechanical Material,” The Proc. of IEEE,
Vol. 70, 420-457, 1982.
R.C. Jaeger, "Introduction to Microelectronics Fabrication," AddisonWesley, 1988.
S.M. Sze, "Semiconductor Sensors," John Wiley & Sons, Inc, New
W.S. Ruska, “Microelectronic Processing,” McGraw-Hill, 1988 Liwei Lin, University of California at Berkeley 44 Microsystems Laboratory
UC-Berkeley, ME Dept. LIGA Proc...
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- Spring '08
- Mechanical Engineering