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Unformatted text preview: tched holes are bonded together and their cavities are filled with mercury
Mini‐socket plugs are inserted to make a circuit board GAS CHROMATOGRAPH
ON A WAFER
SILICON AS A MECHANICAL MATERIAL
KURT E. PETERSEN M E119. F all 2013.
Joanna Wu G AS CHROMATOGRAPH 3. Fabricated on a 2” silicon wafer
with 3 main components: 2. Capillary column
Gas control valve
Detector element 1. 4. 1. Sample input
1. Purge input
6. 5. 2. Valve region
3. Exhaust of unused sample
4. Sensor region
5. Separation column H OW IT WORKS C APILLARY COLUMN
A spiral groove is isotropically etched on the wafer surface 200um wide, 40um
deep, and 1.5m long.
The wafer is anodically bonded to a glass plate to seal the grooves. http://www.sciencedirect.com/science/article/pii/S0925400504004678 G AS CONTROL VALVE The gas valve is etched into the Si in 3 steps:
1. A hole is isotropically etched to form the valve cylinder.
2. An isotropic etch enlarges the valve cylinder and creates a valve seating
3. Holes are anisotropically etched through the wafer such that the orifice is
positioned in the center of t...
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This note was uploaded on 02/03/2014 for the course ME 119 taught by Professor Lwlin during the Spring '08 term at Berkeley.
- Spring '08
- Mechanical Engineering