Proceedingsoftheieeevol70no5may1982fig32 peterson

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Unformatted text preview: But requires additional processing such as dopant-dependent etching http://www.norcada.com/wp‐content/uploads/2012/05/111‐Silicon‐2‐220x147.jpg Membrane Advantages • Reduced parasitic/stray capacitances • Increased frequency response • Exceptional strength, durability, and resistance to vibration and thermal cycling • Excellent thermal isolation for thin-film devices deposited on the membrane • Higher sensitivities, less damage, and longer lifetime in membrane detectors compared to conventional epitaxial detectors Thermal Sensor Petersen, Kurt, E. Proceedings of the IEEE, VOL. 70, NO. 5, May 1982,Fig. 32 Peterson, “Dynamic Micromechanics on Silicon: Techniques and Devices,” IEEE Tran. On Electron Devices, ED-25, 1241-1250, 1978 Micro Switch Liwei Lin, University of California at Berkeley Microsystems Laboratory UC-Berkeley, ME Dept. anisotropic 37 Drake et al., “An Electrostatically Actuated Micro-Relay,” Transducers’95, vol. 2, 380-383, 1995. Micro Relay Liwei Lin, University of California at Berkeley Microsystems La...
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