2 20 red 1e17 blue 1e16 depth m 3 surface

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Unformatted text preview: 2. 10 23 10 22 10 1.2 21 10 1.2 20 red -- 1e17 blue -- 1e16 Depth (µm)) -3 Surface Concentration (cm ) 1 0.8 0.6 0.4 0.2 0 0.95 1 1.05 1.1 1.15 -1 1000/T (K ) 3. 5000 2 Electron Mobility (cm /Vs) 4000 3000 2000 1000 0 15 10 10 16 10 17 10 18 10 19 -3 Donor Concentration (cm ) Here, we can see the mobility dropping as the dopant concentration is raised. This is due to the larger level of impurity scattering of the electrons....
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This document was uploaded on 02/19/2014.

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