Dechev university of victoria with current standard

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Unformatted text preview: not compatible ductor has lower loss and better characteristic of inductance in 14 © N. Dechev, University of Victoria with current standard IC fabrication process. Moreover, none the vertical position after the assembly. We believe that this ben- Serial (Sequential) Assembly of 3D Micro-inductors Micro-Inductors can also be assembled, by serial robot-based systems: © N. Dechev, University of Victoria 15 Serial (Sequential) Assembly of 3D Micro-inductors Example of Assembled 3D Micro-Transformer © N. Dechev, University of Victoria 16 Case Study 8.1: Magnetic Based Micromotor CASE 8.1. Magnetic Motor [Fig. 8.13 from ‘Foundations of MEMS’, Chang Liu] © N. Dechev, University of Victoria 17 Case Study 8.1: Magnetic Based Micromotor Examination of Stator Pole operation: [Fig. 8.13 from ‘Foundations of MEMS’, Chang Liu] © N. Dechev, University of Victoria 18 Magnetic Biomicro-robots Magnetic MEMS can often be used with externally applied magnetic fields, in interesting new applications. The system shown here is a ‘magnetic micro-robot’ that can be moved within the body, by carefully controlling the magnetic field. This alleviates complex ‘on-board propulsion and power issues. If fitted with appropriate tools, the robot can perform various tasks. Bio-Micro-robots [B. Nelson, Institute of Robotics and Intelligent Systems, Swiss Federal Institute] © N. Dechev, University of Victoria 19...
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