step 1 formation of trichlorosilane liquid tboil 32

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Unformatted text preview: Mass Density: The density of a plane of material •  Packing Frac\on: Volume within a unit cell occupied by atoms if the atoms are assumed to be hard spheres with a radius of half the atomic spacing –  Note: It is only in the case of the simple cubic structure that the lance constant is the same as the atomic spacing 7 Silicon Purifica\on Formation of Metalurgical-Grade Silicon (MGS): SiO 2 + 2C → Si + 2CO (~1800 C) Purification of MGS (Removal of Al, Fe, heavy metals, etc.): Step 1: Formation of Trichlorosilane (liquid, TBoil = 32 C) Si + 3HCl → SiHCl3 + H 2 Step 2: Fractional Distillation Step 3: Conversion of Trichlorosilane to Electronic-Grade Silicon 2SiHCl3 + 2H 2 → 2Si + 6HCl 9 Bulk Growth 10 Silicon Ingot 11 Lance Matched Systems Heteroepitaxy: Grown materials are lance matched but have different proper\es than the substrate 13 Strained Layers •  Pseudomorphic Growth:...
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