Channelcomposition thechannelwallsshouldbe either

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Unformatted text preview: nd
wet
 etch
the
oxide
in
49%
HF.
 6.
Etch
exposed
polySi
using
XeF2
(HINT:
Think
Deal‐Grove
model)
 
 
 
 
 
 
 
 
 Problem
#2:

 Surface
 micromachined
 nanofluidic
 channels
 can
 also
 be
 used
 for
 sensing
 biomolecules.
 In
 this
 problem,
 you
 will
 design
 a
 process
 and
 mask
 set
 that
 will
 produce
 nanofluidic
 channels
 with
 an
 integrated
 metal
 electrode
 on
 the
 top
 and
 bottom
of
the
channel
as
shown
below.

Where
a
dimension
is
not
specified
(like
the
 lateral
 extent
 of
 the
 port),
 you
 are
 free
 to
 choose
 a
 process
 that
 you
 think
 makes
 sense.
This
may
turn
out
to
be
an
economic
trade‐off
(for
example,
cost
of
processes
 vs.
wasted
space
on
the
wafer).
 Design
 schematics:
metal
electrodes
are
denoted
in
orange;
channels
and
port...
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