HW1_F2010 - ME141B:IntroductiontoMEMS HOMEWORK#1 Problem#1...

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ME141B: Introduction to MEMS HOMEWORK #1 DUE October 28th 2010 IN CLASS Problem #1: You are a young junior faculty member who has just hired your second graduate student, Jeremiah Rumpleskin. You have developed an idea for using a surface‐ micromachined microfluidic channel for exquisite biomolecule manipulation measurements that you’re sure will make you famous and assure your tenure. You ask Jeremiah to design a process flow for creating this simple structure, and Jeremiah returns with the process flow detailed in the figure below. Being a seasoned MEMS designer, you immediately notice several critical errors with Jeremiah’s process (things that won’t work or won’t produce the result that Jeremiah shows in his cross sections). Please find the critical errors in this process flow and, where possible, suggest alternate approaches. Do not worry about the accumulation of errors, but rather treat each step assuming that the structure up to that step could be created. This structure is actually quite simple to make. Develop a simpler process flow and associated masks to create the final structure. Be sure to show cross‐sectional and planar views of all key steps in the process. Process steps: 1. Start with a quartz wafer.
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