Inadditionwithinthe portsitwouldbenice

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Unformatted text preview: s
are
 in
blue;
oxide
in
the
port
areas
is
selectively
etched
to
allow
access
to
the
channels.
 Channel
composition:
 The
channel
walls
should
be
 either
 oxide
or
nitride,
but
both
 above
and
below
the
channel,
in
close
proximity,
should
have
a
layer
of
metal
that
 can
be
addressed
by
the
contact
pad
(yellow).
The
order
of
the
layers
is
not
specified
 up
 front;
 you
 can
 pick
 any
 order
 that
 is
 feasible.
 The
 metal
 does
 NOT
 need
 to
 be
 insulated
 by
 oxide,
 this
 metal
 can
 be
 directly
 exposed
 to
 the
 liquid.
 Furthermore,
 you
can
either
have
both
electrodes
addressable
by
one
contact
pad,
or
two
separate
 contact
pads
(which
ever
is
easiest
for
your
process).
 Dimensions
of
channel:
7mm
long,
10
um
wide,
100
nm
high.
 
 HINT:
think
carefully
 about
h...
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