Youdonthavetohaveallofthedetailsironedoutontheseapproa

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Unformatted text preview: ow
the
sacrificial
layer
that
you
are
going
to
use
to
define
the
channel
will
be
 etched.
A
long,
thin
channel
will
take
a
long
time
to
etch
using
the
Deal
Grove
model
 so
you
may
need
to
find
an
interesting
way
to
create
the
channel...

 Metal
layer:
at
least
50
nm
thick.
 
 Design Schematic 
 
 Tear
 drop
 ports:
 At
 least
 1mm
 in
 diameter.
 NOTE:
 You
 must
 think
 carefully
 about
 the
port
design.
Since
they
are
so
much
bigger
than
the
channel,
once
you
etch
the
 sacrificial
channel...
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This document was uploaded on 04/02/2014.

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