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In the dialogue box which appears, select “C3 Etch Rate” for Responseand “C2 Power Level” for Factorby double clicking the columns on the left. Then Click Graphsto select the output graphs of the analysis. In the dialogue box, check “Boxplots of data”, “Normal plot of residuals”, “Residuals versus fits” and “Residuals versus order”.Then Click OKback to previous dialogue box. Click OKagain to generate the results of the One-way ANOVA. The One-way ANOVA table is displayed in the session window. The boxplot, normal plot of residuals, residuals versus fits, and residuals versus order graphs are popped-up.
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