Exhibits change in resistance with applied stress

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Exhibits change in resistance with applied stress % Mechanical % Low density - similar to aluminum % High modulus of elasticity - similar to steel % High tensile yield strength - stronger than steel % Almost perfect elasticity - no mechanical hysteresis % Thermal % High thermal conductivity Why MEMS??
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10 Lecture 1 Overview EEL 5225, Fall 2010, David Arnold Ref. K. E. Petersen, “Silicon as a Mechanical Material,” Proc. IEEE 70, pp. 420-457, 1982. Why MEMS??
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11 Lecture 1 Overview EEL 5225, Fall 2010, David Arnold When to use MEMS?? % Old Applications % Equal/improved performance AND cost reduction % Examples: % pressure sensors: automotive, medical, etc. % accelerometers: airbag deployment, etc. % Enabling Technology % Vastly increased functionality (paradigm) AND competitive cost % May enable larger system % Examples: % high resolution color printing via ink jets % large-area projection displays
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12 Lecture 1 Overview EEL 5225, Fall 2010, David Arnold How to make MEMS?? % Microfabrication + Micromachining % Silicon % GaAs % Other elemental or compound semiconductors % Metals (bulk and foils) % Quartz % Sapphire % Ceramics % Plastics, polymers and other organics
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13 Lecture 1 Overview EEL 5225, Fall 2010, David Arnold How to make MEMS?? % Conventional Microfabrication % Borrowed from silicon integrated circuit fabrication % > 40 years of collective equipment and process experience %
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