Electro mechanical magneto mechanical opto mechanical

Info icon This preview shows pages 4–10. Sign up to view the full content.

View Full Document Right Arrow Icon
% Electro-Mechanical % Magneto-Mechanical % Opto-Mechanical % Micro-Optics % Micro-Fluidics % RF-MEMS % Nanotechnology
Image of page 4

Info icon This preview has intentionally blurred sections. Sign up to view the full version.

View Full Document Right Arrow Icon
5 Lecture 1 Overview EEL 5225, Fall 2010, David Arnold Where are MEMS??
Image of page 5
6 Lecture 1 Overview EEL 5225, Fall 2010, David Arnold Where are MEMS?? Source: http:// 2009 MEMS Market Analysis
Image of page 6

Info icon This preview has intentionally blurred sections. Sign up to view the full version.

View Full Document Right Arrow Icon
7 Lecture 1 Overview EEL 5225, Fall 2010, David Arnold Who makes MEMS?? % “Big Companies” % Analog Devices: inertial sensors (airbag deployment) % Texas Instruments: digital micromirrors (DLP technology) % Honeywell: inertial, magnetic, and pressure sensors % Knowles Electronics: microphones % Olympus: optical products % Freescale: acceleration and pressure sensors % Smaller “MEMS Companies” % Universities Texas Instruments Digital Micromirror (DLP Technology) Analog Devices Accelerometer Knowles Microphones Lucent Optical Switch
Image of page 7
8 Lecture 1 Overview EEL 5225, Fall 2010, David Arnold Why MEMS?? % Favorable Scaling Laws % Surface to volume ratio % Thermal, inertial time constants % Size % Portability % Low-power % High-speed % High-spatial resolution % Compatibility % Integration with IC electronics % Large arrays % Cost % Batch-fabrication is ( sometimes ) cheaper than conventional manufacturing % Must produce significant quantities to reduce unit cost!
Image of page 8

Info icon This preview has intentionally blurred sections. Sign up to view the full version.

View Full Document Right Arrow Icon
9 Lecture 1 Overview EEL 5225, Fall 2010, David Arnold % Silicon Properties % Electrical % Resistance varies with doping % Solid-State Effects %
Image of page 9
Image of page 10
This is the end of the preview. Sign up to access the rest of the document.

{[ snackBarMessage ]}

What students are saying

  • Left Quote Icon

    As a current student on this bumpy collegiate pathway, I stumbled upon Course Hero, where I can find study resources for nearly all my courses, get online help from tutors 24/7, and even share my old projects, papers, and lecture notes with other students.

    Student Picture

    Kiran Temple University Fox School of Business ‘17, Course Hero Intern

  • Left Quote Icon

    I cannot even describe how much Course Hero helped me this summer. It’s truly become something I can always rely on and help me. In the end, I was not only able to survive summer classes, but I was able to thrive thanks to Course Hero.

    Student Picture

    Dana University of Pennsylvania ‘17, Course Hero Intern

  • Left Quote Icon

    The ability to access any university’s resources through Course Hero proved invaluable in my case. I was behind on Tulane coursework and actually used UCLA’s materials to help me move forward and get everything together on time.

    Student Picture

    Jill Tulane University ‘16, Course Hero Intern