6.780
Semiconductor Manufacturing
Spring 2003
Problem Set #7
Issued: Monday, April 7, 2003
Due: Monday, April 14, 2003
Problem 1
Resistivity is found to vary in a systematic fashion across a 200 mm wafer. Our goal here is to study the
effect of different

6.780
Semiconductor Manufacturing
Spring 2003
Problem Set #6
Issued: Wednesday, April 2, 2003
Due: Monday, April 7, 2003
Problem 1
Do problem 1 in May & Spanos, Chapter 5, as repeated below.
Assuming a Poisson model, calculate the maximum defect density a

6.780
Semiconductor Manufacturing
Spring 2003
Problem Set #5
Issued: Wednesday, March 12, 2003
Due: Monday, March 31, 2003
Problem 1
A process engineer is about to begin a comprehensive study to determine the effects of five variables on
the etch rate of

6.780
Semiconductor Manufacturing
Spring 2003
Problem Set #4
Issued: Monday, March 3, 2003
Due: Wednesday, March 12, 2003
Problem 1
Working with an excimer laser stepper, you have determined that linewidth measurements and random
variation show a standard

6.780
Semiconductor Manufacturing
Spring 2003
Problem Set #3
Issued: Monday, Feb. 24, 2003
Due: Monday, March 3, 2003
Problem 1
An In-Situ Particle Monitor (ISPM) is a device used in the exhaust of vacuum processing equipment such
as plasma etchers, LPCVD

6.780
Semiconductor Manufacturing
Spring 2003
Problem Set #2
Issued: Wednesday, Feb. 12, 2003
Due: Friday, Feb. 21, 2003
Please write and hand in solutions to the following problems or scenarios. Write your solutions from the
perspective of an engineer se

6.780
Semiconductor Manufacturing
Spring 2003
Problem Set #1
Issued: Friday, Feb. 7, 2003
Due: Wednesday, Feb. 12, 2003
Please write and hand in solutions to the following problems or scenarios. Write your solutions from the
perspective of an engineer sen

SMA 6304 / MIT 2.853 / MIT 2.854
Manufacturing Systems
Lecture 9: Statistical Inference
Lecturer: Prof. Duane S. Boning
1
Copyright 2003 Duane S. Boning.
Agenda
1. Review: Probability Distributions & Random Variables
2. Sampling: Key distributions arisin