ECE/ME/IE 485
Fall 2012
HW #3 Solution
1. As shown in the following figure, five sets of fingers are engaged with their comb fingers
with a width of l0 = 5 m. The thickness of the movable fingers is t = 10m. The initial
value of g = 15 m and the initial v
Exam #1 Review
ECE/ME 485
Time and Location
Tuesday Oct. 28
In class 3013 ECEB
1 hour and 20 minutes
Bring pen/pencil and calculator
A formula sheet will be provided
What are covered in Exam 1
Transducer Concept
Variable of Energy Domains
Lumped Parame
ECE/ME/IE 485
Fall 2013
HW #5
1. Microbolometer Thermal Resistance
Sketched below is the lumped element model for the thermal isolation of the
suspended platform from the substrate. All possible paths for heat transfer by
conduction, including through the
ECE/ME 485
Fall 2012
HW #6 Solution
1.
a) In the piezoresistance matrix for <100> silicon, describe what it means for
a term to have a positive value (such as 11 for n-type Si) versus a negative value
(such as 11 for p-type Si).
If the term is positive (n
ECE/ME/IE 485
Fall 2012
HW #7 Solution
1. A thermal couple is used as a temperature sensor using a two material system of
Fe and Pt.
a. What is the output voltage, V, if the sample temperature is 200C?
Fe 15 V C
Pt 5 V C
ab 10 V C
V 200 25C 45 V C 1.75mV
ECE/ME 485 Fall 2014
Midterm Exam #1
October 28, 2014
This is a closed book exam.
You are allowed to use only the following:
Pen/pencil
A calculator
The supplied formula sheet
Unless stated otherwise, do your work on the problem page and, if necessary, on
ECE/ME 485
Fall 2012
HW #5 Solution
1. A <100> single-crystal silicon beam is attached to a rigid wall. A force of 100
N is acting on the right end of the beam in a direction normal to the wall. For
<100> single-crystal silicon, Youngs modulus E = 130 GPa
ECE/ME/IE 485 Fall 2012
Yi-An Liou, Yukun Ren, Kaiyuan Wang, Shengyuan Zhong, Feng Zhou
Intradermal Drug Pump (IDP)
Executive Summary
In the contemporary society, with the fulfillment of most basic materialistic needs,
the general population is placing mo
1
Analytical Model for Comb Capacitance Fringe
Fields
Hanno Hammer
AbstractAnalytical expressions for electric potential and electric fringe fields in regions above the fingers of MEMS (MicroElectro-Mechanical-System) comb capacitances are derived using
p
Flexural Plate Wave Biochemical Sensor
Lecture 17
ECE/ME 485
Lecture 17
1
Outline
Introduction to acoustic biosensors
Flexural Plate Wave (FPW) acoustic resonator
Example of a real lumped element model
Analytical prediction of resonant frequencies
Ap
1
Lecture 14
Thermal Sensors and Actuators
A Survey of Principles and Applications
ECE/ME 485
Lecture 14
2
Outline
General overview of heat and energy transfer
MEMS Structures
Thermal isolation beams and microheaters
Thermal bimorph
Thermal couples
Ther
Lecture 8
Electrostatically Driven &
Sensed MEMS Devices
How theory from last lecture is
applied in practice
ECE/ME 485
Lecture 8
1
Outline
Basic Capacitor Configurations
Parallel plates
Interdigitated fingers
Applications examples
Sensors
Actuators
Lecture 16
Resonators
A lot of MEMS devices operate because
they can vibrate
ECE/ME485
Lecture 16
1
Outline
Examples of MEMS Resonators
Resonator characteristics
Modeling linear dynamic systems
Spring-mass-damper system
How to estimate resonant frequ
ECE/ME/IE 485
Fall 2013
HW #3
1. Suspended Membrane Lumped Element Model
a) A SiO2 suspended membrane with diameter of 50m is fabricated on a Silicon
substrate. Uniform pressure is applied across the membrane and displaces it
upwards. Draw a lumped elemen
ECE 485 Fall 2013 HW#2 Solution:
1.
Make sure the etch rate of sacrificial material is much larger than that of structural
material at one certain etching method.
2.
3.
4.
141.6 m
Introduction to
Microeletromechanical Systems
(MEMS)
Lecture 4 Topics
Fundamental MEMS Processes and Devices
Surface Micromachined Polysilicon Comb Drives
o Mechanics
Stress and Strain
Cantilevers
Resonance
o Electrostatics
Parallel Plate Capacitor
Study of Capacitance in Electrostatic Comb-Drive
Actuators
P. Hanasi1 , B. G. Sheeparamatti 1 , V. Abbigeri 1 , N. Meti1
1 Visvesvaraya
Technological University, Belagavi, Karnataka, India
Abstract
The objective of this work is to study capacitance in ele
J. Micromech. Microeng. 6 (1996) 320329. Printed in the UK
Comb-drive actuators for large
displacements
Rob Legtenberg, A W Groeneveld and M Elwenspoek
MESA Research Institute, University of Twente, PO Box 217, 7500 AE Enschede,
The Netherlands
Received 3
Excerpt from the Proceedings of the 2011 COMSOL Conference in Boston
Design of a MEMS Capacitive Comb-drive Accelerometer
Tolga Kaya*1, Behrouz Shiari2, Kevin Petsch1 and David Yates2
1
Central Michigan University, 2University of Michigan
* [email protected]
Study of Capacitance in Electrostatic Comb-Drive Actuators
B G Sheeparamatti, Prashant D. Hanasi, Vanita Aibbigeri, Naveen Meti
Department of Electronics and Communication Engineering
Basaveshwar Engineering College, Bagalkot, Karnataka, INDIA
[email protected]
MEMS Fall 2005
Design Project
Department of Mechanical Engineering
Columbia University
Professor Wong
Submitted 12/12/2005
MEMS Comb Drive Actuator to Vary Tension and Compression of
a Resonating Nano-Doubly Clamped Beam for High-Resolution
and High-Sensi
Mechanical Design Principles
Lecture 9-10
Basic mechanical engineering
considerations for MEMS
ECE/ME485
Lecture 9-10
1
Outline
ECE/ME485
Lecture 9-10
Stress and strain
Loading and bending of beams
How to determine the spring constant
Torsional deflection
Piezoresistive Sensors
Lecture 11
Deformation
Piezoresistivity
Resistivity dependent on strain
True for most semiconductors, including Si
Also used to describe metal resistors where resistance
change is geometry-driven (strain gauges)
Characterized by
Microfluidics
Lecture 15
ECE/ME 485
Lecture 15
1
Outline
Motivation: Why mix fluids and MEMS?
A few words about proteins, DNA, and cells
Desired characteristics of Lab-on-a-Chip systems
Basic fluid mechanics concepts
Laminar versus turbulent flow
Reynolds
ECE/ME/IE 485 Fall 2010
Midterm Exam #1
October 14, 2010
This is a closed book exam.
You are allowed to use only the following:
Pen/pencil
A calculator
The supplied formula sheet
Unless stated otherwise, do your work on the problem page and, if necessary,
ECE/ME/IE 485
Fall 2012
HW #8
1. You are trying to flow water at 30C (7.98104 Pa s) through a nanofluidic
channel. The nanofluidic channel has a circular cross-section with a radius of 160nm and
the length is 1cm.
a. Calculate the pressure difference requ
ECE/ME/IE 485
Fall 2012
HW9 Solution
1. Resonant Microsensors. A Figure of Merit (FOM) for the combined sensitivity and
resolution performance of a resonant microsensor technology is sometimes defined as the
magnitude of the wavelength shift induced by th
ECE/ME 485
Fall 2012
HW #4 Solution
1. You are asked to build a 600m x 600m square, 25m thick diaphragm in an
oxidized (100) silicon wafer. The wafer thickness is 300m. You use an
anisotropic etch solution of KOH/H2O that has an etch rate of 10m/hr for (1