Introduction to Micro-Electro-Mechanical-Systems Design
EE 115
-
Winter 2014
MEMS Pro v5.1
Layout Tutorial
1
Physical Design Mask complexity
MEMS masks are complex with curvilinear geometries
Verification of manufacturing design rules is important
Automatic generation of mask layout is needed
2
1
Layout Editor Features
Fully h
Introduction to Micro-Electro-Mechanical-Systems Design
EE 115
-
Fall 2013
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Introduction to Micro-Electro-Mechanical-Systems Design
EE 115
-
Fall 2013
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Introduction to Micro-Electro-Mechanical-Systems Design
EE 115
-
Fall 2013
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Introduction to Micro-Electro-Mechanical-Systems Design
EE 115
-
Spring 2014
EE215 Spring 2012 Homework 1 Solutions
1) Use L-Edit/MEMS Pro in the lab to layout your name in the PolyMUMPS process. Use the
Poly 0 layer to make the letters, which should be about 100 m tall and 50 m wide. Once
you have made your name, make a 100 x 100
Introduction to Micro-Electro-Mechanical-Systems Design
EE 115
-
Winter 2014
4/2/2013
Introduction to Microfabrication
Fabrication
1
4/2/2013
MEMS Fabrication Flow
Basic Process Flow in
Micromachining
Nadim Maluf, An introduction to
Microelectromechanical Systems Engineering
2
4/2/2013
Thin Film Deposition
Thin Film Deposition
Hir
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