10 Vacuum Science and Plasmas
10.1) Since the pressure is ‘ ‘ ‘
still well \’lll1ln ’
. I, . ‘ the V18‘ ~ -
10.10 are still \alld. According to Equation [0 l lions “0W w
of pressure In this regime. The red . .
uction in temper
toward lower velocrties. Acc

Homework Assignment #3
Principals of Device Microfabrication
ELENE4944, Fall 2015
Due Date: 10/19/15 at the start of class.
Assignment: Problems 5.2, 5.5, 5.7, 5.10 of Chapter 5 and 6.2, 6.7 of the Chapter

5.2) From Figure 5.9, if RP = 300 nm, then the energy is about 90 keV. Then ARp = 68
nm. The dose can be found from the peak concentration as
N(x=R,)=lO”cm'3 =——£—, then
(0:427:*6.8*104’cm*10'7cm‘3=1.7*10”cm‘2
If the bulk is 1015 cm'3, then
MPG—IS]: —_._(

7. I) According to Equation 6.5,
A _ 0.2898 cm — K
in.“ _IT
* —() _
=2.898 10 nm K=]4,490 K
200 nm
The internal energy ol‘the gas is 3/2 * kT * N, where N is the number of atoms in the
vapor.
T
N=6.02 *10”“‘°ms& = 2.64 *102' atoms
mOIC
mole
Then the

Homework Assignment #4
Principals of Device Microfabrication
ELENE4944, Fall 2015
Due Date: 11/9/15 at the start of class.
Assignment: Problems 7.1, 7.4, 7.9, 8.2, 8.4, and 8.8 of the Chapter 7 and 8 of the 4th
Edition of the course text.

Homework Assignment #5
Principals of Device Microfabrication
ELENE4944, Fall 2015
Due Date: 11/16/15 at the start of class.
Assignment: Problems 1-6 of the Chapter 10 of the 4th Edition of the course text.
Note: Homework can be turned in at

Below are the solutions to examples for those who followed 3 rd Edition while solving Homework 2.
4.1 and 4.3 are same as 4th Edition
Solution for 4.5, 4.8 and 4.9 can be found below, which are 4.6, 4.9, 4.10 according to 4 th Edition,
respectively.
*4.5

3 Diffusion
3.1) One would need to measure the diffusivity as a function of temperature and then plot
the data as an Arrhenius function (log D vs. 1/ T). Ideally this should be done with various
doping concentrations to extract charge effects. If D is con