EECS 414
Introduction to MEMS
Homework #3
Total: 180 Points
Fall 2007
Handed Out: Due:
Friday Sept. 21, 2007 Friday Sept. 28, 2007
1. This problem deals with etching of the silicon device shown below. The figure shows the cross section and the t

EECS 414 HW 6
1. Given a polysilicon beam with the following properties:
Fall 2005
Length, L 100 m Width, w 20 m Thickness, t 1 m Young's Modulus, E 160 GPa Poisson's Ratio, v 0.23 (a) The beam is fixed on one end and the other end is free to move

EECS 414
Introduction to MEMS Reading Assignments Homework #7 Solutions
Total: 230 Points
Fall 2007
Class Handouts and Notes on materials, mechanical Structures
Handed Out: Due:
Friday October 19, 2007 Friday October 26, 2007
1. Given a polysi