Fabrication and Testing of RFMEMS Switches
Using PCB Techniques
Silva, M. W. n.', Barbin, S. E. 2,3, Member, IEEE, and Kretly, L.
c.',
Member, IEEE
1 Department
of Microwaves and Optics, School of Electrical and Computer Engineering, University of Campin
1150
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 20, NO. 5, OCTOBER 2011
Active MEMS Valves for Flow Control in a
HighPressure MicroGasAnalyzer
Paul Galambos, Jeffrey Lantz, Michael S. Baker, Member, ASME, Jaime McClain,
Gregory R. Bogart, and Robe
MIPRO 2011, May 2327, 2011, Opatija, Croatia
Analysis of Issues with Load Balancing
Algorithms in
Hosted (Cloud) Environments
Branko Radojevi*, Mario agar*
* Croatian Academic and Research Network (CARNet), Zagreb, Croatia
* Faculty of Electrical Enginee
Design and Fabrication of Low Insertion Loss and HighIsolation CMOSMEMS Switch for Microwave Applications
JungTang Huang, YuKun Hsu, YuChih Lo, KuoYu Lee, ChingKong Chen, and Ting Chiang Tsai
National Taipei University of Technology, Department of
2SK118
TOSHIBA Field Effect Transistor Silicon N Channel Junction Type
2SK118
General Purpose and Impedance Converter and
Condenser Microphone Applications
Unit: mm
High breakdown voltage: VGDS = 50 V
High input impedance: IGSS = 1 nA (max) (VGS = 30 V)
L
ROCHESTER INSTITUTE OF TECHNOLOGY
EEEE787 MEMS TEST AND EVALUATION
HOMEWORKMEMS MICROPHONE DESIGN
1.Wtite an expression for the output of the single supply version of the capacitor microphone amplifier
circuit ?
Vo=iR
i=d(CV)/dt
i=VCm2*pi*cos(2*pi*f*t)
1. Find another publication describing the fabrication of a MEMs valve or pump. Describe the
fabrication sequence in your own words. Attach a copy of the paper.
The valve described in this paper is fabricated through the SUMMiT (Sandra Ultraplanar Multil
Design and fabrication of lowinsertion loss and highisolation CMOSMEMS switch
for microwave applications
This paper presents a design of RF MEMS contact switch with high isolation, low
insertion loss, small chip area and low power consumption. The swit
1. Calculate the amount of liquid needed to prepare a sample of 8000 ppm acetone in air?
A volume of 0.0006055 ml in a chamber volume of 0.00025 m 3 is needed to prepare a sample
of 8000 ppm acetone in air.
From the Gas Concentration Calculator on page 17
1.
Find another publication describing the fabrication of a MEMs pressure sensor (or
microphone). Describe the fabrication sequence in your own words.
Fabrication of MEMS microphone described in this paper draws upon processes used to
fabricate about 200
CHAPTER 10. MICRORING RESONATORS
10.1 Single Waveguide Coupled into a Single Ring
A1
A2
A1
B1
B2
t
B1
t
B2
r
A2
= 2: circumference of the ring
: coupling factor
: Intensity attenuation around the ring
: propagation constant
: Insertion loss
1 2
1
=
1
[2
CHAPTER 7. COUPLING INTO/OUT OF WAVEGUIDES
7.1 Coupling Efficiency
Ei ( x ) = E g ( x ) + E r ( x )
The eigenmodes (including radiation modes) of a
Ei(x)
x
Eg(x)
n1
n2
n3
waveguide constitute an orthonormal set.
Ei ( x )
E i ( x ) = Ai
E ( x)
2
i
= Ai ei
CHAPTER 2. REVIEW OF ELECTROMAGNETICS
2.1 Review of Electromagnetic Optics
A. Maxwell Equations
B
Faraday's law
E = t
H = J + D Ampere's law
t
Guass' law
D =
B = 0
Guass' law (magnetic)
Source quantities: , J
Field quantities: E (Efield strength, V/
CHAPTER 11. INTEGRATED GRATINGS
Gratings: 1D photonic crystals.
0/I
11.1 Gratings as Filters
A. Light Propagates through a Periodic Transparency
0>0, 1<0
Grating
The function of a grating: wave splitter
x=linspace(0,10,1001)*pi;fun1=sign(cos(x); fun2=exp
CHAPTER 1. REVIEW OF RAY OPTICS
1.1 Fermats Principle
A. Fundamental Concepts
Speed of light in vacuum: = 2.998 108 m/s.
Refractive index:
B
A
Speed of light in a dielectric medium: = .
Travel time: = =
: the effective length viewed by light (light wave
CHAPTER 3. MATRIX THEORY OF MULTILAYER STACKS
(Based on B.E.A. Saleh and M.C. Teich, Fundamentals of Photonics(2nd ed.), Chapter 7)
3.1 Transmission Matrix and Scattering Matrix
Multilayer stack problems
Infinite number of reflections and transmissions
CHAPTER 8. COUPLING BETWEEN WAVEGUIDES
Long distance
Short distance
1
2
E1
E2
2
1
E1
E2
The two modes are independent of each
The two modes interact with each other.
other single mode.
The two waveguides can be treated as a broad
waveguide multimodes.
8.1
Integrated Optical
Devices and Systems
0308731/631
Microsystems Engineering
Kate Gleason College of Engineering
Rochester Institute of Technology
RIT
Rochester Institute of Technology
Introduction
Terminology:
OIC
OEIC
PIC
PLC
Optical Integrated Circuit
CHAPTER 9. SLOT WAVEGUIDES
In a codirectional coupler, a slot waveguide is formed when the overall dimension of the two
waveguides only support a single mode. For TElike polarization, high electric field (or power
density) can be excited in the low inde
P H YS I CAL
R EVI EW
VOLUM E
182,
NUM 8 ER 2
1
0
JUNE 1969
Surface Plasmons in Thin Films
E. N.
EcoNOMOU*)
The James Franck Institute wsd Department of Physics, The University of Chicago, Chicago, I/linois 6063T
(Received 15 January 1969)
The dispersion
Homework 7
1. PlanarMirror Waveguide.
(a) Demonstrate that a single TEM plane wave
(, ) = exp( ) exp()
2
cannot satisfy the boundary conditions, ( , ) = 0 at all z, in the mirror waveguide il1ustrated
below.
(b) When does the sum of two TEM plane waves
CHAPTER 12. INTRODUCTION TO PHOTONIC CRYSTALS
12.1 OneDimensional Photonic Crystals
B
Faraday's law
E t  jr 0 H
H J D j (r ) E Ampere's law
r
0
t
Guass' law
D 0
B 0
Guass' law (magnetic)
From (2),
1
H j0 E
r (r )
Define impermeability () = 1()
(r
Homework 4
Problem 1. Function and Comb Function. Prove the following properties of functions:
(a)
(, ) =
1
(, )

1
(b) comb ()comb() =

(c) (, ) =
( ) ( )
= =
(, ) [comb () comb ( )] defines
a periodic function with period in the
direction and peri
Homework 1
Problem 1. PlanoConcave Lens Design. A planoconcave lens with focal length is illustrated below.
When a collimated beam is normally incident, the lens reshapes the beam as if it were from a point source.
Based on the raytracing method, deter
Homework 5
1. A transparency of amplitude transmittance (, ) is illuminated with a plane wave of wavelength
= 1m and intensity = 1 W/m2. Determine and plot the Fraunhofer diffraction pattern at distance
= 100 cm for the following cases:
(a) (, ) = ( + )
Homework 2
Problem 1. Intensity of a Spherical Wave. Derive an expression for the intensity of a spherical wave at
a distance from its center in terms of the optical power . What is the intensity = 1 m for = 100
W?
(0.5+0.5 pt)
Problem 2. Electric Field o
Homework 6
1. Refractive Index of Air. The refractive index of air can be precisely measured with the help
of a Michelson interferometer and a tunable light source. At atmospheric pressure and a
temperature of 20 C, the refractive index of air differs fro
Homework 3
Problem 1. Standing Waves. Derive an expression for the intensity of the superposition of two plane
waves of wavelength traveling in opposite directions along the axis. Sketch versus .
(1 pt)
Hints: You need to express a plane wave propagating