4-1.Assuming that particles in clean-room air move only downwards (i.e., fall) at a velocity of 1 m/min, how many 1.0-m-diameter and larger particles...
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<ol><li>4-1. Assuming that particles in clean-room air move only downwards (i.e., fall) at a velocity

of 1 m/min, how many 1.0-μm-diameter and larger particles will land on a 100-cm2 wafer per hour? Perform this calculation for Class 1, 10, 100, 1000, and 10,000 clean rooms.</li><li>4-2. Plot the chip length (assume the chip is square) as a function of defects per 100-cm2 wafer for chip yields of 90%, 99%, and 99.9%. Show the equations you use.</li><li>4-3. List several types of contamination and their typical/possible sources.</li><li>4-4. Describe the different methods used to clean wafers and list which general types of contaminants they should be good at removing.</li></ol>

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